Optimization of flexure geometry in out-of-plane capacitive accelerometer for mechanical sensitivity enhancement

2005 ◽  
Author(s):  
Azrif Manut ◽  
Ibrahim Mat ◽  
Mohd Ismahadi Syono
2021 ◽  
Vol 30 (1) ◽  
pp. 19-27
Author(s):  
Kumar Gomathi ◽  
Arunachalam Balaji ◽  
Thangaraj Mrunalini

Abstract This paper deals with the design and optimization of a differential capacitive micro accelerometer for better displacement since other types of micro accelerometer lags in sensitivity and linearity. To overcome this problem, a capacitive area-changed technique is adopted to improve the sensitivity even in a wide acceleration range (0–100 g). The linearity is improved by designing a U-folded suspension. The movable mass of the accelerometer is designed with many fingers connected in parallel and suspended over the stationary electrodes. This arrangement gives the differential comb-type capacitive accelerometer. The area changed capacitive accelerometer is designed using Intellisuite 8.6 Software. Design parameters such as spring width and radius, length, and width of the proof mass are optimized using Minitab 17 software. Mechanical sensitivity of 0.3506 μm/g and Electrical sensitivity of 4.706 μF/g are achieved. The highest displacement of 7.899 μm is obtained with a cross-axis sensitivity of 0.47%.


Author(s):  
G.A. Bertero ◽  
R. Sinclair

Pt/Co multilayers displaying perpendicular (out-of-plane) magnetic anisotropy and 100% perpendicular remanent magnetization are strong candidates as magnetic media for the next generation of magneto-optic recording devices. The magnetic coercivity, Hc, and uniaxial anisotropy energy, Ku, are two important materials parameters, among others, in the quest to achieving higher recording densities with acceptable signal to noise ratios (SNR). The relationship between Ku and Hc in these films is not a simple one since features such as grain boundaries, for example, can have a strong influence on Hc but affect Ku only in a secondary manner. In this regard grain boundary separation provides a way to minimize the grain-to-grain magnetic coupling which is known to result in larger coercivities and improved SNR as has been discussed extensively in the literature for conventional longitudinal recording media.We present here results from the deposition of two Pt/Co/Tb multilayers (A and B) which show significant differences in their coercive fields.


2011 ◽  
Vol 131 (7) ◽  
pp. 235-239 ◽  
Author(s):  
Kaoru Yamashita ◽  
Tomoya Yoshizaki ◽  
Minoru Noda ◽  
Masanori Okuyama

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