Study of electrical properties of hafnium oxide thin film based metal–insulator–metal capacitors: pre and post metallic annealing

Journal of Materials Science Materials in Electronics ◽

10.1007/s10854-016-5783-8 ◽

2016 ◽

Vol 27 (12) ◽

pp. 12527-12532 ◽

Author(s):

O. Mangla ◽

V. Gupta

Keyword(s):

Thin Film ◽

Electrical Properties ◽

Hafnium Oxide ◽

Oxide Thin Film ◽

Metal Insulator ◽

Metal Insulator Metal

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Impacts of Cu/TaN Electrode on the Electrical Properties of Metal-insulator-metal (Ba,Sr)TiO3 Thin-film Capacitors

10.7567/ssdm.2007.c-7-1 ◽

2007 ◽

Author(s):

Wen-Fa Wu ◽

Kou-Chiang Tsai ◽

Chuen-Guang Chao ◽

Jain-Tsai Lee ◽

Wei-Che Chang ◽

...

Keyword(s):

Thin Film ◽

Electrical Properties ◽

Tio3 Thin Film ◽

Metal Insulator ◽

Thin Film Capacitors ◽

Metal Insulator Metal

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Electrical Properties of $\hbox{Bi}_{5}\hbox{Nb}_{3} \hbox{O}_{15}$ Thin Film Grown on $\hbox{TiN}/\hbox{SiO}_{2}/ \hbox{Si}$ at Room Temperature for Metal–Insulator–Metal Capacitors

IEEE Electron Device Letters ◽

10.1109/led.2009.2020441 ◽

2009 ◽

Vol 30 (6) ◽

pp. 614-616 ◽

Author(s):

Kyung-Hoon Cho ◽

Tae-Geun Seong ◽

Joo-Young Choi ◽

Jin-Seong Kim ◽

Sahn Nahm ◽

...

Keyword(s):

Thin Film ◽

Electrical Properties ◽

Room Temperature ◽

Metal Insulator ◽

Metal Insulator Metal ◽

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Study of the effect of thermal annealing on high k hafnium oxide thin film structure and electrical properties of MOS and MIM devices

Journal of Materials Science Materials in Electronics ◽

10.1007/s10854-010-0230-8 ◽

2010 ◽

Vol 22 (7) ◽

pp. 882-889 ◽

Author(s):

A. Srivastava ◽

R. K. Nahar ◽

C. K. Sarkar

Keyword(s):

Thin Film ◽

Electrical Properties ◽

Thermal Annealing ◽

Hafnium Oxide ◽

Film Structure ◽

Oxide Thin Film ◽

Thin Film Structure ◽

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Electron emission and electrical properties of MIM (metal-insulator-metal) thin film cathodes for various insulating layers

Vacuum ◽

10.1016/s0042-207x(80)81086-4 ◽

1980 ◽

Vol 30 (1) ◽

pp. 42

Keyword(s):

Thin Film ◽

Electrical Properties ◽

Electron Emission ◽

Metal Insulator ◽

Metal Thin Film ◽

Metal Insulator Metal

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Influence of precursor chemistry and growth temperature on the electrical properties of SrTiO3-based metal-insulator-metal capacitors grown by atomic layer deposition

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena ◽

10.1116/1.3525280 ◽

2011 ◽

Vol 29 (1) ◽

pp. 01AC04 ◽

Author(s):

H. García ◽

H. Castán ◽

A. Gómez ◽

S. Dueñas ◽

L. Bailón ◽

...

Keyword(s):

Electrical Properties ◽

Atomic Layer Deposition ◽

Growth Temperature ◽

Atomic Layer ◽

Precursor Chemistry ◽

Metal Insulator ◽

Layer Deposition ◽

Metal Insulator Metal

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Some Structural Dependent Electrical Properties of Tantalum-Tantalum Oxide Thin-Film Resistors

IEEE Transactions on Parts Materials and Packaging ◽

10.1109/tpmp.1967.1135714 ◽

1967 ◽

Vol 3 (1) ◽

pp. 14-20 ◽

Author(s):

R. Weber

Keyword(s):

Thin Film ◽

Electrical Properties ◽

Tantalum Oxide ◽

Oxide Thin Film ◽

Thin Film Resistors

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Effects of dielectric thickness and contact area on current–voltage characteristics of thin film metal–insulator–metal diodes

Thin Solid Films ◽

10.1016/j.tsf.2007.08.067 ◽

2008 ◽

Vol 516 (8) ◽

pp. 2244-2250 ◽

Author(s):

Subramanian Krishnan ◽

Elias Stefanakos ◽

Shekhar Bhansali

Keyword(s):

Thin Film ◽

Contact Area ◽

Metal Insulator ◽

Dielectric Thickness ◽

Current Voltage ◽

Metal Insulator Metal ◽

Current Voltage Characteristics

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Electrical properties of metal-insulator-metal and metal-insulator-semiconductor structures containing Langmuir-Blodgett insulating multilayers

Thin Solid Films ◽

10.1016/0040-6090(89)90173-9 ◽

1989 ◽

Vol 179 (1-2) ◽

pp. 121-127 ◽

Author(s):

F Kaneko ◽

M Shibata ◽

Y Inaba ◽

S Kobayashi

Keyword(s):

Electrical Properties ◽

Metal Insulator ◽

Metal Insulator Semiconductor ◽

Langmuir Blodgett ◽

Semiconductor Structures ◽

Metal Insulator Metal

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The effects of rapid thermal annealing and microwave annealing on the electrical properties of ZrO2 metal-insulator-metal capacitors

Optik ◽

10.1016/j.ijleo.2018.11.048 ◽

2019 ◽

Vol 179 ◽

pp. 1057-1062 ◽

Author(s):

Q.X. Zhang ◽

Y.P. Ge ◽

X.Q. Gu ◽

F. Peng ◽

M. Luo

Keyword(s):

Electrical Properties ◽

Thermal Annealing ◽

Rapid Thermal Annealing ◽

Metal Insulator ◽

Microwave Annealing ◽

Metal Insulator Metal

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$hboxBaSm_2hboxTi_4hboxO_12$Thin Film for High-Performance Metal–Insulator–Metal Capacitors

IEEE Electron Device Letters ◽

10.1109/led.2006.881085 ◽

2006 ◽

Vol 27 (9) ◽

pp. 740-742 ◽

Author(s):

B.J. Kim ◽

Y.H. Jeong ◽

B.Y. Jang ◽

J.B. Lim ◽

S. Nahm ◽

...

Keyword(s):

Thin Film ◽

High Performance ◽

Metal Insulator ◽

Metal Insulator Metal

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