Vacuum-assisted piezoelectric cantilever mass sensor performance

Microbeams have a wide range of applications as sensors and actuators in nanotechnology, biotechnology, microelectromechanical systems, and optics. Given their micrometer dimensions, these beams make precision mass sensors of sub-nanogram accuracy. An important challenge regarding mass sensors is to enhance their sensitivity and accuracy. Considering the fact that, this type of sensor operates based on the resonance frequency variations caused by nanoparticle absorption in the dynamic mode, the geometry of the microbeam is considered an important parameter affecting their sensitivity. This paper studies the rectangular microbeam, which is one of the most commonly used types of mass sensors. Three main models were selected by applying inner and outer cuts on the microbeam, and vibrating simulation was carried out using ABAQUS software for a total of 36 mass sensor configurations with different aspect ratios. Simulation results in two selected rectangular microbeam models with outer cuts show the sensitivity of the microsensor increases with increased microbeam rigidity. The triangular hollow microbeam was found to be the best design among the four models selected to be used as mass sensors.

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Weather Effects on Target Acquisition Part 1: Sensor Performance Model Infrared Algorithms

10.21236/ada394576 ◽

2001 ◽

Cited By ~ 1

Author(s):

Richard C. Shirkey ◽

Barbara J. Sauter ◽

Rene V. Cormier

Keyword(s):

Performance Model ◽

Target Acquisition ◽

Weather Effects ◽

Sensor Performance

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Through-the-Sensor Determination of AN/AQS-20 Sensor Performance Demonstration 1, December 13 through 17, 2004

10.21236/ada435218 ◽

2005 ◽

Author(s):

Michael Harris ◽

William Avera ◽

Chad Steed ◽

John Sample ◽

Leonard D. Bibee ◽

...

Keyword(s):

Sensor Performance ◽

Performance Demonstration

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Innovative Techniques to Predict Atmospheric Effects on Sensor Performance

10.21236/ada518404 ◽

2009 ◽

Author(s):

Anthony V. Dentamaro ◽

Patricia H. Hohert

Keyword(s):

Atmospheric Effects ◽

Sensor Performance ◽

Innovative Techniques

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Meteorological Measurement Systems

10.1093/oso/9780195134513.001.0001 ◽

2001 ◽

Cited By ~ 6

Author(s):

Fred V. Brock ◽

Scott J. Richardson

Keyword(s):

Dynamic Performance ◽

Measurement Systems ◽

Sensor Performance ◽

Performance Specifications ◽

Meteorological Measurement ◽

Design Type ◽

Static Sensitivity ◽

And Function ◽

Logical Functions ◽

Source Of Error

This book treats instrumentation used in meteorological surface systems, both on the synoptic scale and the mesoscale, and the instrumentation used in upper air soundings. The text includes material on first- and second-order differential equations as applied to instrument dynamic performance, and required solutions are developed. Sensor physics are emphasized in order to explain how sensors work and to explore the strengths and weaknesses of each design type. The book is organized according to sensor type and function (temperature, humidity, and wind sensors, for example), though several unifying themes are developed for each sensor. Functional diagrams are used to portray sensors as a set of logical functions, and static sensitivity is derived from a sensor's transfer equation, focusing attention on sensor physics and on ways in which particular designs might be improved. Sensor performance specifications are explored, helping to compare various instruments and to tell users what to expect as a reasonable level of performance. Finally, the text examines the critical area of environmental exposure of instruments. In a well-designed, properly installed, and well-maintained meteorological measurement system, exposure problems are usually the largest source of error, making this chapter one of the most useful sections of the book.

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Study of GaN Dual-Drain Magnetic Sensor Performance at Elevated Temperatures

IEEE Transactions on Electron Devices ◽

10.1109/ted.2019.2901203 ◽

2019 ◽

Vol 66 (4) ◽

pp. 1937-1941 ◽

Cited By ~ 2

Author(s):

B. R. Thomas ◽

S. Faramehr ◽

D. C. Moody ◽

J. E. Evans ◽

M. P. Elwin ◽

...

Keyword(s):

Elevated Temperatures ◽

Magnetic Sensor ◽

Sensor Performance

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Modeling the Piezoelectric Cantilever Resonator with Different Width Layers

Sensors ◽

10.3390/s21010087 ◽

2020 ◽

Vol 21 (1) ◽

pp. 87

Author(s):

Zhenxi Liu ◽

Jiamin Chen ◽

Xudong Zou

Keyword(s):

Resonance Frequency ◽

Integrated Circuit ◽

Silicon Oxide ◽

Fem Simulation ◽

Control Process ◽

Design Tool ◽

Piezoelectric Cantilever ◽

Simulation And Experiment ◽

Easy Integration ◽

Tip Displacement

The piezoelectric cantilever resonator is used widely in many fields because of its perfect design, easy-to-control process, easy integration with the integrated circuit. The tip displacement and resonance frequency are two important characters of the piezoelectric cantilever resonator and many models are used to characterize them. However, these models are only suitable for the piezoelectric cantilever with the same width layers. To accurately characterize the piezoelectric cantilever resonators with different width layers, a novel model is proposed for predicting the tip displacement and resonance frequency. The results show that the model is in good agreement with the finite element method (FEM) simulation and experiment measurements, the tip displacement error is no more than 6%, the errors of the first, second, and third-order resonance frequency between theoretical values and measured results are 1.63%, 1.18%, and 0.51%, respectively. Finally, a discussion of the tip displacement of the piezoelectric cantilever resonator when the second layer is null, electrode, or silicon oxide (SiO2) is presented, and the utility of the model as a design tool for specifying the tip displacement and resonance frequency is demonstrated. Furthermore, this model can also be extended to characterize the piezoelectric cantilever with n-layer film or piezoelectric doubly clamped beam.

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