7664. The relation between lift-off of photoresist and the surface coverage of trimethylsiloxy groups on silicon wafers: a quantitative time-of-flight secondary ion mass spectroscopy and contact angle study
Keyword(s):
Lift Off
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1990 ◽
Vol 8
(3)
◽
pp. 463
◽
1997 ◽
Vol 15
(6)
◽
pp. 1908
◽
Keyword(s):
2011 ◽
Vol 82
(3)
◽
pp. 033101
◽
2001 ◽
Vol 146-147
◽
pp. 378-383
◽
Keyword(s):
1999 ◽
Vol 17
(5)
◽
pp. 2191
◽
2013 ◽
Vol 139
(22)
◽
pp. 224701
◽
2005 ◽
Vol 68
(21)
◽
pp. 1907-1916
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