Comparative study of 3D measurement techniques (SPM, SEM, TEM) for submicron structures

1995 ◽  
Vol 27 (1-4) ◽  
pp. 547-550 ◽  
Author(s):  
Henri R.J.R. van Helleputte ◽  
Theo B.J. Haddeman ◽  
Martin J. Verheijen ◽  
Jan-Jaap Baalbergen
Keyword(s):  
Comparative Study ◽  
Measurement Techniques ◽  
3D Measurement ◽  
Submicron Structures

On-Line Industrial 3D Measurement Techniques for Large Volume Objects

2005 ◽  
Vol 295-296 ◽  
pp. 423-430 ◽  
Author(s):  
Ji Gui Zhu ◽  
S.H. Ye ◽  
Xue You Yang ◽  
Xing Hua Qu ◽  
C.J. Liu ◽  
...  
Keyword(s):  
Large Volume ◽  
Measurement Techniques ◽  
Integrated System ◽  
3D Measurement ◽  
Digital Cameras ◽  
Combined Use ◽  
Small Set ◽  
Close Range ◽  
On Line ◽  
Set Up

Rapid progress in modern manufacturing demands for better measurement technique with on-line characteristics. This paper presents a systematic visual solution for on-line industrial 3D measurement. The solution comprises two parts, a multi-sensor visual inspecting station (MSVIS) and a digital close-range visual inspecting station (DCVIS). MSVIS is an integrated system with many sensors. It can meet the requirement of application with sparse measuring points distributed within a large volume. DCVIS only contains two digital cameras with one or more projectors. It has high relative accuracy and a small set up volume and is suitable for applications with dense measuring points. The combined use of MSVIS and DCVIS can provide a general solution for on-line industrial 3D measurement.

A Comparative Study of Soluble Sulfate Measurement Techniques

2012 ◽  
Author(s):  
Nagasreenivasu Talluri ◽  
Ahmed Gaily ◽  
Anand J. Puppala ◽  
Bhaskar Chittoori
Keyword(s):  
Comparative Study ◽  
Measurement Techniques ◽  
Soluble Sulfate

A Comparative Study of Basic Edge Angle Measurement Techniques

1980 ◽  
Vol 45 (4) ◽  
pp. 857-865 ◽  
Author(s):  
Harold L. Dibble ◽  
Mary C. Bernard
Keyword(s):  
Comparative Study ◽  
Measurement Techniques ◽  
Angle Measurement ◽  
Relative Accuracy ◽  
Statistical Analyses ◽  
Edge Angle ◽  
Angle Measurements ◽  
Measuring Techniques

Four methods of edge angle measurements, including one developed by the authors, are applied to a sample of unretouched flakes in order to determine their relative accuracy, reliability, and economy. The authors discuss various statistical analyses which are available and essential in evaluating the significance of variability between and within the different measuring techniques, applying them to the results obtained from this study.

Sign in / Sign up

Export Citation Format

Share Document