Ultra-precision machining by the hydrodynamic polishing process

1996 ◽  
Vol 36 (2) ◽  
pp. 275-291 ◽  
Author(s):  
Yaw-Terng Su ◽  
Chuen-Chyi Horng ◽  
Shuh-Yi Wang ◽  
Shao-Herng Jang
2013 ◽  
Vol 631-632 ◽  
pp. 550-555
Author(s):  
Wen Qiang Peng ◽  
Sheng Yi Li ◽  
Chao Liang Guan ◽  
Xin Min Shen

Material removed by mechanical process inevitably causes surface or subsurface damage containing cracks, plastic scratch, residual stress or dislocations. In nano-abrasive jet polishing (NAJP) the material is removed by chemical impact reaction. The chemical impact reaction is validated by contrast experiment with traditional lap polishing process in which the material is mainly removed through mechanical process. Experiment results show the dependence of the abrasive particles on the choice of materials. Even if the abrasive particle and the workpiece are composed of similar components, the machining properties are remarkably different due to slight differences in their physical properties or crystallography etc. Plastic scratches on the sample which was polished by the traditional mechanical process are completely removed by NAJP process, and the surface root-square-mean roughness has decreased from 1.403nm to 0.611nm. The NAJP process will become a promising method for ultra precision machining method for ultrasmooth optical surface.


2010 ◽  
Vol 426-427 ◽  
pp. 376-380 ◽  
Author(s):  
Yu Li Sun ◽  
Dun Wen Zuo ◽  
Jun Li ◽  
Wen Zhuang Lu ◽  
Z.Z. Yu

Ice fixed abrasives (IFA) polishing is a novel ultra-precision machining method. The motion tracks of abrasives during IFA polishing have an important effect on the quality of the machined silicon wafer. Firstly, the motion tracks of IFA polishing are theoretically analyzed in this paper. It is founded that the paths of any point in the IFA polishing pad relative to the wokpiece are a group of cycloids. Then, the motion tracks of single abrasive and multiple abrasives in the IFA polishing pad are simulated respectively. The results show that increasing the eccentricity is beneficial to the enlargement of the size range of polishing process. With the increasing of the speed ratio between the IFA polishing pad and the workpiece, the abrasive at higher speed can leave longer tracks on the workpiece than that at lower speed at the same time. The more the abrasives, the more uniform the mark density under the influence of more abrasives.


2003 ◽  
Vol 43 (12) ◽  
pp. 1197-1207 ◽  
Author(s):  
Yaw-Terng Su ◽  
Tu-Chieh Hung ◽  
Chun-Cheng Weng

Micromachines ◽  
2021 ◽  
Vol 12 (8) ◽  
pp. 929
Author(s):  
Xudong Yang ◽  
Zexiao Li ◽  
Linlin Zhu ◽  
Yuchu Dong ◽  
Lei Liu ◽  
...  

Taper-cutting experiments are important means of exploring the nano-cutting mechanisms of hard and brittle materials. Under current cutting conditions, the brittle-ductile transition depth (BDTD) of a material can be obtained through a taper-cutting experiment. However, taper-cutting experiments mostly rely on ultra-precision machining tools, which have a low efficiency and high cost, and it is thus difficult to realize in situ measurements. For taper-cut surfaces, three-dimensional microscopy and two-dimensional image calculation methods are generally used to obtain the BDTDs of materials, which have a great degree of subjectivity, leading to low accuracy. In this paper, an integrated system-processing platform is designed and established in order to realize the processing, measurement, and evaluation of taper-cutting experiments on hard and brittle materials. A spectral confocal sensor is introduced to assist in the assembly and adjustment of the workpiece. This system can directly perform taper-cutting experiments rather than using ultra-precision machining tools, and a small white light interference sensor is integrated for in situ measurement of the three-dimensional topography of the cutting surface. A method for the calculation of BDTD is proposed in order to accurately obtain the BDTDs of materials based on three-dimensional data that are supplemented by two-dimensional images. The results show that the cutting effects of the integrated platform on taper cutting have a strong agreement with the effects of ultra-precision machining tools, thus proving the stability and reliability of the integrated platform. The two-dimensional image measurement results show that the proposed measurement method is accurate and feasible. Finally, microstructure arrays were fabricated on the integrated platform as a typical case of a high-precision application.


Micromachines ◽  
2021 ◽  
Vol 12 (7) ◽  
pp. 755
Author(s):  
Chen-Yang Zhao ◽  
Chi-Fai Cheung ◽  
Wen-Peng Fu

In this paper, an investigation of cutting strategy is presented for the optimization of machining parameters in the ultra-precision machining of polar microstructures, which are used for optical precision measurement. The critical machining parameters affecting the surface generation and surface quality in the machining of polar microstructures are studied. Hence, the critical ranges of machining parameters have been determined through a series of cutting simulations, as well as cutting experiments. First of all, the influence of field of view (FOV) is investigated. After that, theoretical modeling of polar microstructures is built to generate the simulated surface topography of polar microstructures. A feature point detection algorithm is built for image processing of polar microstructures. Hence, an experimental investigation of the influence of cutting tool geometry, depth of cut, and groove spacing of polar microstructures was conducted. There are transition points from which the patterns of surface generation of polar microstructures vary with the machining parameters. The optimization of machining parameters and determination of the optimized cutting strategy are undertaken in the ultra-precision machining of polar microstructures.


2006 ◽  
Vol 532-533 ◽  
pp. 109-112
Author(s):  
Xun Lv ◽  
Ju Long Yuan ◽  
Dong Hui Wen ◽  
Qian Fa Deng ◽  
Fei Yan Lou

The high precision balls are requested in national defense, astronautics and high-tech commercial domain urgently. Conventional precision machining methods are sensitive to uniformity of abrasives and machining environment. After precision machining, there are easily to produce thick damaged layer on the ball surface because of machining stress and chemical conversion. On the basis of the floating polishing mechanism, a new scatheless ultra-precision polishing method of ball surface can solve the problems of abrasives uniformity effectively and damaged layer. In order to ensure that the new polishing method polishes ball surface equally, the appropriate angular velocities of the ball should be selected. This paper sets up the mathematical model about the motion of ball. By analyzing and simulating the relationship of the angular velocities, the best processing parameters are acquired.


CIRP Annals ◽  
2011 ◽  
Vol 60 (1) ◽  
pp. 141-144 ◽  
Author(s):  
S. Min ◽  
J. Lidde ◽  
N. Raue ◽  
D. Dornfeld

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