Optimizing amorphous indium zinc oxide film growth for low residual stress and high electrical conductivity

2013 ◽  
Vol 283 ◽  
pp. 65-73 ◽  
Author(s):  
Mukesh Kumar ◽  
A.K. Sigdel ◽  
T. Gennett ◽  
J.J. Berry ◽  
J.D. Perkins ◽  
...  
Keyword(s):  
Electrical Conductivity ◽  
Residual Stress ◽  
Zinc Oxide ◽  
Oxide Film ◽  
Film Growth ◽  
Zinc Oxide Film ◽  
High Electrical Conductivity ◽  
Indium Zinc Oxide

Smooth indium zinc oxide film prepared by sputtering a In2O3:ZnO=95:5 target

2007 ◽  
Vol 38 (12) ◽  
pp. 1202-1206 ◽  
Author(s):  
Shang-Chou Chang ◽  
Ming-Hua Shiao
Keyword(s):  
Zinc Oxide ◽  
Oxide Film ◽  
Zinc Oxide Film ◽  
Indium Zinc Oxide

H2O beams for zinc oxide film growth produced by a Pt-catalyzed H2–O2reaction at various divergent aperture angles of a de Laval nozzle

2016 ◽  
Vol 55 (2S) ◽  
pp. 02BC12
Author(s):  
Yusuke Teraguchi ◽  
Yuki Ishidzuka ◽  
Tomoki Nakamura ◽  
Kazumasa Takahashi ◽  
Yasuhiro Tamayama ◽  
...  
Keyword(s):  
Zinc Oxide ◽  
Oxide Film ◽  
Laval Nozzle ◽  
Film Growth ◽  
Zinc Oxide Film ◽  
De Laval Nozzle ◽  
Pt Catalyzed

Plasma pretreatment of polycarbonate substrates for indium zinc oxide film deposition

2016 ◽  
Vol 49 (5) ◽  
pp. 376-383 ◽  
Author(s):  
Xuan Zhang ◽  
Jianlin Lang ◽  
Yue Yan ◽  
Xiaofeng Zhang ◽  
Yanli Zhong ◽  
...  
Keyword(s):  
Zinc Oxide ◽  
Oxide Film ◽  
Film Deposition ◽  
Zinc Oxide Film ◽  
Indium Zinc Oxide ◽  
Plasma Pretreatment

Effect of annealing temperature on optical band-gap of amorphous indium zinc oxide film

2011 ◽  
Vol 509 (41) ◽  
pp. 10062-10065 ◽  
Author(s):  
Ju-Won Jeon ◽  
Dae-Woo Jeon ◽  
Trilochan Sahoo ◽  
Myoung Kim ◽  
Jong-Hyeob Baek ◽  
...  
Keyword(s):  
Zinc Oxide ◽  
Oxide Film ◽  
Band Gap ◽  
Annealing Temperature ◽  
Optical Band Gap ◽  
Zinc Oxide Film ◽  
Indium Zinc Oxide

The electrical conduction properties of poly-crystalline indium-zinc-oxide film

2014 ◽  
Vol 115 (8) ◽  
pp. 083701 ◽  
Author(s):  
S. Tomai ◽  
K. Terai ◽  
T. Junke ◽  
Y. Tsuruma ◽  
K. Ebata ◽  
...  
Keyword(s):  
Zinc Oxide ◽  
Oxide Film ◽  
Electrical Conduction ◽  
Zinc Oxide Film ◽  
Indium Zinc Oxide ◽  
Conduction Properties

Zinc oxide film growth on zirconium boride

2006 ◽  
Vol 39 (1-4) ◽  
pp. 179-184 ◽  
Author(s):  
Shunichi Hishita ◽  
Takashi Aizawa ◽  
Shigeki Otani ◽  
Shigeru Suehara ◽  
Hajime Haneda
Keyword(s):  
Zinc Oxide ◽  
Oxide Film ◽  
Film Growth ◽  
Zirconium Boride ◽  
Zinc Oxide Film
Sign in / Sign up

Export Citation Format

Share Document