Improving the gas barrier properties of a-SiOxCyNz film at low temperature using high energy and suitable nitrogen flow rate
2013 ◽
Vol 13
(5)
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pp. 885-889
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Keyword(s):
2013 ◽
Vol 228
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pp. S490-S494
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Keyword(s):
2015 ◽
Vol 66
(9)
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pp. 1410-1415
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Keyword(s):
2018 ◽
Vol 14
(1)
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pp. 31-60
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Keyword(s):
Keyword(s):
2016 ◽
Vol 85
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pp. 198-203
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2009 ◽
Vol 11
(3)
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pp. 14-17
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