Improving the gas barrier and mechanical properties of a-SiO x films synthesized at low temperature by using high energy and hydrogen flow rate control
2015 ◽
Vol 66
(9)
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pp. 1410-1415
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2021 ◽
Vol 46
(11)
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pp. 7676-7700
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2013 ◽
Vol 13
(5)
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pp. 885-889
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2006 ◽
Vol 1127
(1-2)
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pp. 214-220
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2021 ◽
Vol 5
(10)
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2007 ◽
Vol 16
(8)
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pp. 1623-1627
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