Investigations on electrical properties of a-C:H thin films deposited in a Microwave Multipolar Plasma reactor excited at Distributed Electron Cyclotron Resonance
2008 ◽
Vol 17
(7-10)
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pp. 1710-1715
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2001 ◽
Vol 34
(7)
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pp. 1025-1031
1995 ◽
Vol 24
(10)
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pp. 1435-1441
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1995 ◽
Vol 10
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pp. 2864-2869
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1996 ◽
Vol 45
(2)
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pp. 155-158
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2010 ◽
Vol 207
(3)
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pp. 591-594
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1999 ◽
Vol 2
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pp. 291
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1998 ◽
Vol 16
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pp. 2751-2756
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1996 ◽
Vol 11
(3)
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pp. 422-426
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