Investigation of structure and mechanical properties of TiZrHfNiCuCo high entropy alloy thin films synthesized by magnetron sputtering

Recently, high-entropy alloy thin films (HEATFs) with nanocrystalline structures and high hardness were developed by magnetron sputtering technique and have exciting potential to make small structure devices and precision instruments with sizes ranging from nanometers to micrometers. However, the strength and deformation mechanisms are still unclear. In this work, nanocrystalline Al0.3CoCrFeNi HEATFs with a thickness of ~4 μm were prepared. The microstructures of the thin films were comprehensively characterized, and the mechanical properties were systematically studied. It was found that the thin film was smooth, with a roughness of less than 5 nm. The chemical composition of the high entropy alloy thin film was homogeneous with a main single face-centered cubic (FCC) structure. Furthermore, it was observed that the hardness and the yield strength of the high-entropy alloy thin film was about three times that of the bulk samples, and the plastic deformation was inhomogeneous. Our results could provide an in-depth understanding of the mechanics and deformation mechanism for future design of nanocrystalline HEATFs with desired properties.

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High entropy alloy thin films deposited by magnetron sputtering of powder targets

Thin Solid Films ◽

10.1016/j.tsf.2015.02.070 ◽

2015 ◽

Vol 580 ◽

pp. 71-76 ◽

Cited By ~ 55

Author(s):

B.R. Braeckman ◽

F. Boydens ◽

H. Hidalgo ◽

P. Dutheil ◽

M. Jullien ◽

...

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

High Entropy Alloy ◽

High Entropy

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Microstructures and mechanical properties of CoCrFeNiAl0.3 high-entropy alloy thin films by pulsed laser deposition

Applied Surface Science ◽

10.1016/j.apsusc.2019.07.186 ◽

2019 ◽

Vol 494 ◽

pp. 72-79 ◽

Cited By ~ 9

Author(s):

Tian-Wei Lu ◽

Chuang-Shi Feng ◽

Zheng Wang ◽

Kai-Wen Liao ◽

Zhi-Yuan Liu ◽

...

Keyword(s):

Thin Films ◽

Mechanical Properties ◽

Pulsed Laser Deposition ◽

Pulsed Laser ◽

Laser Deposition ◽

High Entropy Alloy ◽

High Entropy ◽

Microstructures And Mechanical Properties

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Microstructure and mechanical properties of (AlCrTiZrV)Nx high-entropy alloy nitride films by reactive magnetron sputtering

Vacuum ◽

10.1016/j.vacuum.2020.109706 ◽

2020 ◽

Vol 181 ◽

pp. 109706 ◽

Cited By ~ 1

Author(s):

Liqiang Chen ◽

Wei Li ◽

Ping Liu ◽

Ke Zhang ◽

Fengcang Ma ◽

...

Keyword(s):

Mechanical Properties ◽

Magnetron Sputtering ◽

Reactive Magnetron Sputtering ◽

High Entropy Alloy ◽

Reactive Magnetron ◽

High Entropy ◽

Microstructure And Mechanical Properties

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Size effects on the mechanical properties of nanocrystalline NbMoTaW refractory high entropy alloy thin films

International Journal of Plasticity ◽

10.1016/j.ijplas.2017.04.013 ◽

2017 ◽

Vol 95 ◽

pp. 264-277 ◽

Cited By ~ 47

Author(s):

X.B. Feng ◽

J.Y. Zhang ◽

Y.Q. Wang ◽

Z.Q. Hou ◽

K. Wu ◽

...

Keyword(s):

Thin Films ◽

Mechanical Properties ◽

Size Effects ◽

High Entropy Alloy ◽

High Entropy

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Thermal Stability of MoNbTaVW High Entropy Alloy Thin Films

Coatings ◽

10.3390/coatings10100941 ◽

2020 ◽

Vol 10 (10) ◽

pp. 941

Author(s):

Ao Xia ◽

Robert Franz

Keyword(s):

Thin Films ◽

Mechanical Properties ◽

Thermal Stability ◽

Solid Solution ◽

Electrical Conductivity ◽

High Entropy Alloy ◽

Solid Solution Phase ◽

Body Centered Cubic ◽

High Entropy ◽

Thermal Stability Of

Refractory high entropy alloys are an interesting material class because of their high thermal stability, decent electrical conductivity, and promising mechanical properties at elevated temperature. In the present work, we report on the thermal stability of body-centered cubic MoNbTaVW solid solution thin films that were synthesized by cathodic arc deposition. After vacuum annealing up to 1600 °C, the morphology, chemical composition, crystal structure, and electrical conductivity, as well as the mechanical properties, were analyzed. The observed body-centered cubic MoNbTaVW solid solution phase is stable up to 1500 °C. The evolution of electrical and mechanical properties due to the annealing treatment is discussed based on the observed structural changes of the synthesized thin films.

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