Comparative study of optical properties of germanium carbon films deposited by reactive sputtering and co-sputtering

2013 ◽  
Vol 363 ◽  
pp. 46-49 ◽  
Author(s):  
Xing-Sen Che ◽  
Zheng-Tang Liu ◽  
Yang-Ping Li ◽  
Ning Wang
2008 ◽  
Vol 17 (7-10) ◽  
pp. 1655-1659 ◽  
Author(s):  
M. Smietana ◽  
J. Szmidt ◽  
M.L. Korwin-Pawlowski ◽  
N. Miller ◽  
A.A. Elmustafa

2004 ◽  
Vol 18 (18) ◽  
pp. 987-1001 ◽  
Author(s):  
M. RUSOP ◽  
S. ADHIKARI ◽  
A. M. M. OMER ◽  
S. ADHIKARY ◽  
H. UCHIDA ◽  
...  

The effects of annealing temperature on the optical properties of nitrogenated amorphous carbon (a-C:N) films grown on quartz substrates by a novel surface wave microwave plasma chemical vapor deposition (SWMP-CVD) method are reported. The thickness, optical, structural and bonding properties of the as-grown and anneal-treated a-C:N films were measured and compared. The film thickness decreased rapidly with increasing annealing temperature above 350°C. A wide range of optical absorption characteristics is observed, depending on the annealing temperature. The optical band gap of as-grown a-C:N films is approximately 2.8 eV, gradually decreasing to 2.5 eV for the films anneal-treated at 300°C, and beyond that decreasing rapidly down to 0.9 eV at 500°C. The Raman and FTIR spectroscopy measurements have shown that the structural and composition of the films can be tuned by optimizing the annealing temperature. The change of optical, structural and bonding properties of SWMP-CVD-grown a-C:N films with higher annealing temperature was attributed to the fundamental changes in the bonding and band structures of the films.


Sign in / Sign up

Export Citation Format

Share Document