28 nm pitch of line/space pattern transfer into silicon substrates with chemo-epitaxy Directed Self-Assembly (DSA) process flow

2014 ◽  
Vol 123 ◽  
pp. 180-186 ◽  
Author(s):  
Boon Teik Chan ◽  
Shigeru Tahara ◽  
Doni Parnell ◽  
Paulina A. Rincon Delgadillo ◽  
Roel Gronheid ◽  
...  
2015 ◽  
Author(s):  
HsinYu Tsai ◽  
Hiroyuki Miyazoe ◽  
Joy Cheng ◽  
Markus Brink ◽  
Simon Dawes ◽  
...  

2014 ◽  
Author(s):  
Dan B. Millward ◽  
Gurpreet S. Lugani ◽  
Ranjan Khurana ◽  
Scott L. Light ◽  
Ardavan Niroomand ◽  
...  

Materials ◽  
2021 ◽  
Vol 14 (2) ◽  
pp. 274
Author(s):  
Shih-Jyun Shen ◽  
Demei Lee ◽  
Yu-Chen Wu ◽  
Shih-Jung Liu

This paper reports the binary colloid assembly of nanospheres using spin coating techniques. Polystyrene spheres with sizes of 900 and 100 nm were assembled on top of silicon substrates utilizing a spin coater. Two different spin coating processes, namely concurrent and sequential coatings, were employed. For the concurrent spin coating, 900 and 100 nm colloidal nanospheres of latex were first mixed and then simultaneously spin coated onto the silicon substrate. On the other hand, the sequential coating process first created a monolayer of a 900 nm nanosphere array on the silicon substrate, followed by the spin coating of another layer of a 100 nm colloidal array on top of the 900 nm array. The influence of the processing parameters, including the type of surfactant, spin speed, and spin time, on the self-assembly of the binary colloidal array were explored. The empirical outcomes show that by employing the optimal processing conditions, binary colloidal arrays can be achieved by both the concurrent and sequential spin coating processes.


2013 ◽  
Vol 12 (4) ◽  
pp. 041305 ◽  
Author(s):  
Hsin-Yu Tsai ◽  
Hiroyuki Miyazoe ◽  
Sebastian Engelmann ◽  
Chi-Chun Liu ◽  
Lynne Gignac ◽  
...  

2017 ◽  
Vol 46 (7) ◽  
pp. 4405-4413 ◽  
Author(s):  
Shijie Wang ◽  
Wei Deng ◽  
Yong Ann Seow ◽  
Bing Chen ◽  
Qun Ying Lin
Keyword(s):  

2015 ◽  
Author(s):  
Dung Quach ◽  
Valeriy V. Ginzburg ◽  
Mingqi Li ◽  
Janet Wu ◽  
Shih-wei Chang ◽  
...  

2010 ◽  
Vol 1253 ◽  
Author(s):  
Sharath Sriram ◽  
Madhu Bhaskaran ◽  
Arnan Mitchell

AbstractA self-assembly driven process to synthesize island-structured dielectric films is presented. An intermetallic reaction in platinized silicon substrates provides preferential growth sites for the complex oxide dielectric (strontium-doped lead zirconate titanate) layer. Microscopy and spectroscopy analyses have been used to propose a mechanism for this structuring process. This provides a simple and scalable process to synthesize films with increased surface area for sensors, especially those materials with a complex chemistry.


Nanomaterials ◽  
2020 ◽  
Vol 10 (12) ◽  
pp. 2443
Author(s):  
Tommaso Giammaria ◽  
Ahmed Gharbi ◽  
Anne Paquet ◽  
Paul Nealey ◽  
Raluca Tiron

This work reports a novel, simple, and resist-free chemo-epitaxy process permitting the directed self-assembly (DSA) of lamella polystyrene-block-polymethylmethacrylate (PS-b-PMMA) block copolymers (BCPs) on a 300 mm wafer. 193i lithography is used to manufacture topographical guiding silicon oxide line/space patterns. The critical dimension (CD) of the silicon oxide line obtained can be easily trimmed by means of wet or dry etching: it allows a good control of the CD that permits finely tuning the guideline and the background dimensions. The chemical pattern that permits the DSA of the BCP is formed by a polystyrene (PS) guide and brush layers obtained with the grafting of the neutral layer polystyrene-random-polymethylmethacrylate (PS-r-PMMA). Moreover, data regarding the line edge roughness (LER) and line width roughness (LWR) are discussed with reference to the literature and to the stringent requirements of semiconductor technology.


2016 ◽  
Author(s):  
Yusuke Kasahara ◽  
Yuriko Seino ◽  
Hironobu Sato ◽  
Hitoshi Kubota ◽  
Hideki Kanai ◽  
...  

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