The structures of low dielectric constant SiOC thin films prepared by direct and remote plasma enhanced chemical vapor deposition
2000 ◽
Vol 39
(Part 2, No. 12B)
◽
pp. L1324-L1326
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2002 ◽
Vol 149
(8)
◽
pp. F92
◽
2008 ◽
Vol 53
(1)
◽
pp. 351-356
◽
2005 ◽
Vol 44
(7A)
◽
pp. 4886-4890
◽
1999 ◽
Vol 38
(Part 1, No. 3A)
◽
pp. 1356-1358
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