Influence of thermal treatment in N2 atmosphere on chemical, microstructural and optical properties of indium tin oxide and nitrogen doped indium tin oxide rf-sputtered thin films

2013 ◽  
Vol 541 ◽  
pp. 121-126 ◽  
Author(s):  
H. Stroescu ◽  
M. Anastasescu ◽  
S. Preda ◽  
M. Nicolescu ◽  
M. Stoica ◽  
...  
Keyword(s):  
Thin Films ◽  
Optical Properties ◽  
Thermal Treatment ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Nitrogen Doped ◽  
N2 Atmosphere

Improving the Morphological and Optical Properties of Sputtered Indium Tin Oxide Thin Films by Adopting Ultralow-Pressure Sputtering

2009 ◽  
Vol 156 (1) ◽  
pp. J6 ◽  
Author(s):  
Myung Soo Huh ◽  
Bong Seop Yang ◽  
Jaewon Song ◽  
Jaeyeong Heo ◽  
Seok-Jun Won ◽  
...  
Keyword(s):  
Thin Films ◽  
Optical Properties ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Oxide Thin Films

scholarly journals Nanostructural Characterisation and Optical Properties of Sputter-Deposited Thick Indium Tin Oxide (ITO) Coatings

Coatings ◽  
2020 ◽  
Vol 10 (11) ◽  
pp. 1127
Author(s):  
Andrius Subacius ◽  
Bill Baloukas ◽  
Etienne Bousser ◽  
Steve J. Hinder ◽  
Mark A. Baker ◽  
...  
Keyword(s):  
Thin Films ◽  
Optical Properties ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Nanocrystalline Structure ◽  
Optical Transmittance ◽  
Glass Substrates ◽  
Ito Thin Films ◽  
Sputter Deposited ◽  
Thick Coatings

Indium tin oxide (ITO) thin films, used in many optoelectronic applications, are typically grown to a thickness of a maximum of a few hundred nanometres. In this work, the composition, microstructure and optical/electrical properties of thick ITO coatings deposited by radio frequency magnetron sputtering from a ceramic ITO target in an Ar/O2 gas mixture (total O2 flow of 1%) on unheated glass substrates are reported for the first time. In contrast to the commonly observed (200) or (400) preferential orientations in ITO thin films, the approximately 3.3 μm thick coatings display a (622) preferential orientation. The ITO coatings exhibit a purely nanocrystalline structure and show good electrical and optical properties, such as an electrical resistivity of 1.3 × 10−1 Ω·cm, optical transmittance at 550 nm of ~60% and optical band gap of 2.9 eV. The initial results presented here are expected to provide useful information for future studies on the synthesis of high-quality thick ITO coatings.

Application of Spectroscopic Ellipsometry for the Study of Electrical and Optical Properties of Indium Tin Oxide Thin Films

2014 ◽  
Vol 34 (10) ◽  
pp. 1031003
Author(s):  
胡慧 Hu Hui ◽  
张丽平 Zhang Liping ◽  
孟凡英 Meng Fanying ◽  
刘正新 Liu Zhengxin
Keyword(s):  
Thin Films ◽  
Optical Properties ◽  
Tin Oxide ◽  
Spectroscopic Ellipsometry ◽  
Indium Tin Oxide ◽  
Oxide Thin Films ◽  
Electrical And Optical Properties
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