An on-wafer test structure to measure the effect of thermally-induced stress on silicon devices
1997 ◽
Vol 37
(10-11)
◽
pp. 1441-1444
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2008 ◽
Vol 40
(3)
◽
pp. 202-210
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Keyword(s):
2014 ◽
Vol 2014
(1)
◽
pp. 000500-000504
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Keyword(s):
2015 ◽
Vol 45
(1)
◽
pp. 21-29
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Keyword(s):
1994 ◽
Vol 25
(2)
◽
pp. 415-425
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2006 ◽
Vol 127
(2)
◽
pp. 221-227
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Keyword(s):
2004 ◽
Vol 71
(2)
◽
pp. 150-162
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2008 ◽
Vol 3
(3)
◽
pp. 135-140
◽
2020 ◽
Keyword(s):