Effects of energetic particle bombardment on residual stress, microstrain and grain size of plasma-assisted PVD Cr thin films
Keyword(s):
2017 ◽
Vol 164
(13)
◽
pp. D828-D834
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2013 ◽
Vol 62
(7)
◽
pp. 457-463
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Keyword(s):
Effect of Annealing on Microstructure and Mechanical Properties of Magnetron Sputtered Cu Thin Films
2015 ◽
Vol 2015
◽
pp. 1-8
◽
Keyword(s):
Cu Films
◽
2017 ◽
Vol 25
(7)
◽
pp. 075004
◽
2014 ◽
Vol 602-603
◽
pp. 1004-1008
Keyword(s):
2015 ◽
Vol 646
◽
pp. 766-772
◽