Deposition and structural characterization of poly-Si thin films on Al-coated glass substrates using hot-wire chemical vapor deposition
2003 ◽
Vol 430
(1-2)
◽
pp. 120-124
◽
Keyword(s):
Hot Wire
◽
2016 ◽
Vol 668
◽
pp. 187-193
◽
Keyword(s):
2007 ◽
Vol 46
(4A)
◽
pp. 1415-1426
◽