A Jeolco 200A Cartridge with Specimen Heating, Tilting, and Power Provisions
1975 ◽
Vol 33
◽
pp. 152-153
Keyword(s):
Ex Situ
◽
The transmission electron microscopic study of thin metal film interconnections on electronic integrated circuits requires a sophisticated in-situ capability. Electromigration, particularly, cannot be investigated solely by viewing static heat-treated or electrically stressed specimens ex-situ. The key to the early electromigration studies by Blech, and others, was the in-situ observation of material movement in anelectrical-powering-stage equipped TEM. Blech's approach was insensitive to structure effects because of an absence of heating capability; he therefore relied on joule heating and temperature gradient effects.
1978 ◽
Vol 42
(8)
◽
pp. 787-795
◽
1997 ◽
Vol 273
(5)
◽
pp. L1036-L1041
◽
2003 ◽
Vol 107
(28)
◽
pp. 6698-6703
◽
1986 ◽
Vol 44
◽
pp. 334-335
1986 ◽
Vol 44
◽
pp. 500-501
1996 ◽
Vol 54
◽
pp. 986-987