Combined Use of Structure Imaging and Microanalysis in Structure-Composition Analysis By A 400-KV High-Resolution Analytical Electron Microscope

1985 ◽  
Vol 43 ◽  
pp. 228-229
Author(s):  
Yoshio Bando ◽  
Yoshizo Kitami ◽  
Mamoru Mitcmo
Keyword(s):  
Electron Microscope ◽  
High Resolution ◽  
Image Resolution ◽  
Composition Analysis ◽  
Transmission Electron ◽  
Resolution Observation ◽  
Composition Determination ◽  
Analytical Electron ◽  
Analytical Electron Microscope ◽  
Normal Transmission

One of the limitations in the use of the conventional analytical electron microscope (AEM) with lower voltages of 100 to 200 kV is based on its poor image resolution compared to normal transmission electron microscope. Because of this, it is difficult to carry out structure determination by directly observing individual atom arrangements in crystals. However, a new AEM with an intermediate voltage of 400 kV (JEM-4000EX, TEMSCAN) is fully capable of high resolution observation under equipment of an energy dispersive x-ray spectrometer (EDS) and an electron energy loss spectrometer (EELS). The present paper shows crystal structure images of sialon polytypes and corresponding EDS and EELS spectra, and describes the usefullness of combined techniques of structure imaging and microanalysis in structure-composition determination.

Some Advantages of a 400-Kv High Resolution Analytical Electron Microscopy

1985 ◽  
Vol 43 ◽  
pp. 144-145
Author(s):  
Y. Bando ◽  
Y. Matsui ◽  
Y. Kitami ◽  
Y. Inomata ◽  
T. Oikawa ◽  
...  
Keyword(s):  
High Resolution ◽  
Analytical Electron Microscopy ◽  
Image Resolution ◽  
Point Of View ◽  
Contrast Transfer Function ◽  
Fundamental Limitations ◽  
Specimen Holder ◽  
Resolution Observation ◽  
Analytical Electron ◽  
Resolution Imaging

There are some fundamental limitations in the use of the conventional analytical electron microscope (AEM), which restricts notably observation capabilities of high resolution imaging and microanalysis, mainly due to its poor image resolution and low peak to background ratio in EDS and EELS spectra, because operating voltages are lower in the range of 100 to 200 kV. It can be expected that such observation capabilities are very much improved with the increase of the accelerating voltage. From the point of view, a new JEM-4000EX AEM with an intermediate voltage of 400 kV is much prefered. The present paper describes some advantages of the 400 kV high resolution AEM in the use of both high resolution observation and microanalysis in EDS and EELS.Fig.1 shows a phase contrast transfer function (CTF) curve, obtained for the JEM-4000EX with full analytical systems, in which a side entry specimen holder of beryllium stage with tilting angles of 30° in X-Y double axes is used. The EDS detector with a high angle location of 68, an energy analyzer (ASEA40) and a scanning image device (ASID40) are attached to the column.

The Analysis of Particles With Energy Dispersive X-Ray Spectroscopy (EDS)

1998 ◽  
Vol 4 (S2) ◽  
pp. 184-185
Author(s):  
J. A. Small ◽  
J. A. Armstrong ◽  
D. S. Bright ◽  
B. B. Thorne
Keyword(s):  
Electron Microscope ◽  
Elemental Analysis ◽  
Electron Probe ◽  
Initial Particle ◽  
X Ray ◽  
Transmission Electron ◽  
Analytical Electron ◽  
Analytical Electron Microscope ◽  
The Individual ◽  
Individual Particles

The addition of the Si-Li detector to the electron probe, the scanning electron microscope, and more recently the transmission electron microscope (resulting in the analytical electron microscope) has made it possible to obtain elemental analysis on individual “particles” with dimensions less than 1 nm using EDS. Although some initial particle studies on micrometer-sized particles were done on the electron probe using wavelength dispersive spectrometers, WDS, the variability and complexity of many particle compositions coupled with the high currents necessary for WDS made elemental analysis of particles by WDS difficult at best. In addition, the use of multiple spectrometers, each with a different view of the particle and therefore different particle geometry as shown in Fig. 1, limited the quantitative capabilities of the technique. With the introduction of the Si-Li detector, there was only one spectrometer with a single geometry resulting in the development of various procedures for obtaining quantitative elemental analysis of the individual particles.

scholarly journals Development of a 300kV ultrahigh resolution analytical electron microscope

1991 ◽  
Vol 49 ◽  
pp. 350-351
Author(s):  
Kurio Fukushima ◽  
Yoshihiro Arai ◽  
Masahiro Kawasaki ◽  
Yasushi Kokubo
Keyword(s):  
Electron Microscope ◽  
Electron Gun ◽  
External View ◽  
Ultrahigh Resolution ◽  
Science Field ◽  
Heating And Cooling ◽  
Resolution Observation ◽  
Analytical Electron ◽  
Analytical Electron Microscope ◽  
Characteristic Features

Intended for atomic-level observation and analysis in the material science field, a 300 kV ultrahigh resolution analytical electron microscope (UHRAEM) has been newly developed on the basis of the JEM-2010, a 200 kV UHRAEM. There are two versions: the UHR version, intended for ultrahigh resolution observation with a point resolution of 0.17 nm and the multi-purpose HT version, featuring specimen tilt angles as large as± 40° , and heating and cooling holders. The external view of the instrument is shown in Fig.1. Some characteristic features of the 300 kV UHRAEM are shown as follows.Electron Gun: An extremely stable and compact 300 kV election gun is constructed with 10-stage accelerating tube. SF6 gas is used for electric insulation.

Comparison of Performance of an Analytical Electron Microscope at 300 and 100 kV

1984 ◽  
Vol 41 ◽  
Author(s):  
J. Bentley ◽  
E. A. Kenik ◽  
P. Angelini ◽  
A. T. Fisher ◽  
P. S. Sklad ◽  
...  
Keyword(s):  
Electron Microscope ◽  
Materials Science ◽  
Convergent Beam Electron Diffraction ◽  
Beam Electron ◽  
X Ray ◽  
Transmission Electron ◽  
Analytical Electron ◽  
Analytical Electron Microscope ◽  
Convergent Beam ◽  
Electron Energy Loss

AbstractPreliminary results on the performance of an analytical electron microscope (AEM) operating at 300 kV have been obtained and compared with the performance at 100 kV. Some features of the anticipated improvements for transmission electron microscopy (TEM) imaging, convergent beam electron diffraction (CBED), energy dispersive X-ray spectroscopy (EDS), and electron energy loss spectroscopy (EELS) have been studied from the aspect of materials science applications. The electron microscope used was a Philips EM430T operated with a LaB6 cathode and equipped with EDAX 9100/70 EDS and Gatan 607 EELS systems.

Trace Element Quantitation in Biological X-Ray Microanalysis

1998 ◽  
Vol 4 (S2) ◽  
pp. 212-213
Author(s):  
R.D. Leapman ◽  
C.R. Swyt-Thomas ◽  
D. v. Agoston ◽  
N. Pivovarova ◽  
S.B. Andrews
Keyword(s):  
Electron Microscope ◽  
High Resolution ◽  
Dry Weight ◽  
Limiting Factor ◽  
X Ray ◽  
Elemental Concentrations ◽  
Analytical Electron ◽  
Analytical Electron Microscope ◽  
Counting Statistics ◽  
Edx Microanalysis

In high-resolution biological energy-dispersive x-ray (EDX) microanalysis it is often necessary to measure very low elemental concentrations. As an example, calcium, a physiologically important element, typically occurs in subcellular compartments at concentrations of 10-100 atomic parts per million (corresponding to 1-10 millimole/kg dry weight of sample) and it is ultimately desirable to measure the concentration of this element with a standard error of ±1 atomic ppm (or ± 0.1 millimole/kg). Detection of calcium in biological specimens is further complicated by the presence of relatively high levels of potassium (around 0.5 atomic % or 500 millimole/kg), which gives rise to overlap of the K Kβ and Ca Kα peaks in the EDX spectrum. Counting statistics are frequently the limiting factor for detectability, but this is not necessarily the case because in the analytical electron microscope it is possible to collect spectra for long periods using a high probe current.

Energy Dispersive Spectrometry in the AEM

1998 ◽  
Vol 4 (S2) ◽  
pp. 186-187
Author(s):  
J. R. Michael
Keyword(s):  
Electron Microscope ◽  
Standard Technique ◽  
Energy Dispersive ◽  
Confined Space ◽  
Transmission Electron ◽  
Robust Techniques ◽  
Analytical Electron ◽  
Analytical Electron Microscope ◽  
Detector Placement ◽  
Published Account

Energy-dispersive x-ray spectrometry (EDS) with a SiLi detector has become a standard technique in the analytical electron microscope (AEM). There have been many difficulties to overcome involving both the interfacing of the spectrometer to the microscope and in developing robust techniques for quantitative analysis of thin specimens. The AEM is a difficult environment for EDS due to the high accelerating voltages (100-400 kV) typically used and due to constraints on detector placement relative to the specimen as a result of the confined space within the specimen region of the AEM. The first published account of the installation of SiLi EDS on a transmission electron microscope (TEM) occurred in 1969. In this paper and subsequent publications, these authors described many of the difficulties that still haunt EDS in the AEM.The initial attempts at interfacing EDS to a TEM column demonstrated that the. specimen stage of a TEM was not ideal for this purpose.

scholarly journals Materials science applications of a 120kV FEG TEM/STEM: Triskaidekaphilia

1991 ◽  
Vol 49 ◽  
pp. 698-699
Author(s):  
J. Bentley ◽  
A. T. Fisher ◽  
E. A. Kenik ◽  
Z. L. Wang
Keyword(s):  
Electron Microscope ◽  
Materials Science ◽  
X Ray ◽  
Transmission Electron ◽  
Analytical Electron ◽  
Analytical Electron Microscope ◽  
Scanning Transmission ◽  
Potential Impact ◽  
Electron Microscopes ◽  
Electron Energy Loss

The introduction by several manufacturers of 200kV transmission electron microscopes (TEM) equipped with field emission guns affords the opportunity to assess their potential impact on materials science by examining applications of similar 100-120kV instruments that have been in use for more than a decade. This summary is based on results from a Philips EM400T/FEG configured as an analytical electron microscope (AEM) with a 6585 scanning transmission (STEM) unit, ED AX 9100/70 or 9900 energy dispersive X-ray spectroscopy (EDS) systems, and Gatan 607 serial- or 666 parallel-detection electron energy-loss spectrometers (EELS). Examples in four areas that illustrate applications that are impossible or so difficult as to be impracticable with conventional thermionic electron guns are described below.

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