Quantitative EDS analysis in the SEM applying the XPP procedure
Extensive work has been done during the last decade to develop new models able to improve the performance of data reduction procedures 1n quantitative x-ray microanalysis. Some of them are now successfully used as routine tools in microprobe work, and allow to analyze accurately light and ultra-light elements and to characterize layered specimens.In the field of analytical scanning electron microscopy (SEM) using energy dispersive spectrometers (EDS), it seems that less attention has been paid to the effective improvement of the quantitation processes. Although EDS systems have unavoidable limitations due to their lower peak-to-background ratio and poorer resolution, the authors have the feeling that the quantitative results can be significantly improved by use of more reliable models taking properly into account the specific instrumental and experimental conditions.With this aim in view, our first contribution has been to implement our recently developed XPP model and associated routines (mass absorption coefficients, efficiency of the Quantum window) into the KEVEX Delta system.