Characterization of Crystalline Defects Using CBED Techniques
Convergent beam electron diffraction (CBED) is a technique widely used for obtaining crystallographic information from a small region in a specimen. In recent years CBED technique have been mainly used for the symmetry characterization of perfect crystals. However, the study of crystals containing defects by CBED have received little attention in the literature1-4. The results presented in this communication explore some of the image contrast characteristics obtained in theoretical simulations of zero-order laue zone (ZOLZ) reflections. These calculations have been carried out for crystalline specimens wich contain dislocations or stacking faults. The theoretical simulations are based on the multibeam form of the dynamical theory using ato mic scattering factors reported by Doyle and Turner5. The Fourier coefficients of the lattice pottential were Debye-Waller corrected in all cases. Some of the most important parameters which have strong influence on image contrast have been explored. These include, the thickness of the specimen, the depth of defect in the specimen, the multibeam effects, the nature of the defects etc.