Theoretical Study of Weak-Beam Images of Stacking Faults Decorated with Impurities
Weak—beam dark—field images of stacking faults in silicon vary in an interesting way as the angle of inclination of a fault to the beam changes. It is observed that the contrast of images formed with beam +g varies with angle of inclination at a rate different from that associated with beam −g. For the case of an extrinsic fault it was found that this variation can be calculated using the kinematical theory of scattering and by modelling the fault as two discontinuous changes to the crystal potential across neighbouring (111) plane. Thus the weak—beam imaging technique is sensitive to some of the details of atomic arrangements near the fault. To explain the contrast variation of intrinsic faults it is necessary to model the smooth transition of the crystal potential from one side of the fault to the other. While such a model gives a qualitatative description of experimental studies it is not able to account for the large differences in contrast between +g images and −g images that have been observed experimentally. In this paper it is postulated that the presence of impurity atoms near the plane of the fault accounts for some of the features of experimental observations.The theory is based on the kinematical theory of scattering and the rigid ion model of the crystal potential. A crystal containing a stacking fault consists of a unit which repeats indefinitely in directions parallel to the plane of the fault. Along a line perpendicular to the fault the repeat unit is displaced by a vector R across the plane of the fault. The impurity atoms are assumed to be distributed periodically on planes parallel to the fault.