Overview of the Metrological Scanning Probe Microscopes at PTB
2005 ◽
Vol 11
(S03)
◽
pp. 2-5
◽
Keyword(s):
Quantitative dimensional measurements of micro- and nanometre-sized structures are urgently required from science and industry. Due to their very high vertical resolution (down to sub nanometres) and high lateral resolution (<10 nm) scanning probe microscopes (SPMs) are of great interest for such metrological applications. Additionally, SPM methods are able to measure surfaces in a number of modes like contact, intermittent-contact and non-contact mode. The forces between tip and sample are low during the measurement and, even in contact mode, reach only a few nanonewtons. This fact prevents scratching of the measured surface during the SPM scanning procedure even when very sharp tips are used.
2014 ◽
Vol 20
(1)
◽
pp. 90-98
◽
1989 ◽
Vol 333
(4-5)
◽
pp. 335-336
◽
Keyword(s):
2004 ◽
Vol 108
(9)
◽
pp. 2816-2821
◽
1991 ◽
Vol 49
◽
pp. 488-489
2011 ◽
1992 ◽