Probing and Analyzing Buried Interfaces of Multifunctional Oxides Using a Secondary Electron Energy Analyzer

AbstractA contactless method of probing and analyzing multifunctional oxide interfaces using an electron energy analyzer inside a scanning electron microscope is presented. High contrast experimental secondary electron analyzer signals are used to detect changes in the interface conductivity of a LaAlO3/SrTiO3 sample. Monte Carlo simulations of the primary beam/specimen interaction are carried out and correlated with the experimental results in order to help understand the role of the primary beam energy and adjust it to enhance contrast.

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First experimental results of an E-beam tester with dispersive secondary electron energy analyzer

Microelectronic Engineering ◽

10.1016/s0167-9317(87)80016-3 ◽

1987 ◽

Vol 7 (2-4) ◽

pp. 231-234 ◽

Cited By ~ 9

Author(s):

Luc Dubbeldam ◽

Pieter Kruit

Keyword(s):

Electron Energy ◽

Secondary Electron ◽

Experimental Results ◽

Energy Analyzer

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Development of a secondary electron energy analyzer for a transmission electron microscope

Microscopy ◽

10.1093/jmicro/dfx126 ◽

2018 ◽

Vol 67 (2) ◽

pp. 121-124

Author(s):

Hideyuki Magara ◽

Takeshi Tomita ◽

Yukihito Kondo ◽

Takafumi Sato ◽

Zentaro Akase ◽

...

Keyword(s):

Electron Microscope ◽

Electron Energy ◽

Transmission Electron Microscope ◽

Secondary Electron ◽

Microchannel Plate ◽

Energy Spectra ◽

Electron Holography ◽

Energy Analyzer ◽

Backscattered Electrons ◽

Transmission Electron

Abstract A secondary electron (SE) energy analyzer was developed for a transmission electron microscope. The analyzer comprises a microchannel plate (MCP) for detecting electrons, a coil for collecting SEs emitted from the specimen, a tube for reducing the number of backscattered electrons incident on the MCP, and a retarding mesh for selecting the energy of SEs incident on the MCP. The detection of the SEs associated with charging phenomena around a charged specimen was attempted by performing electron holography and SE spectroscopy using the energy analyzer. The results suggest that it is possible to obtain the energy spectra of SEs using the analyzer and the charging states of a specimen by electron holography simultaneously.

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Retarding-field electron energy analyzer with a two-tube adapting lens for voltage contrast

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100129450 ◽

1992 ◽

Vol 50 (2) ◽

pp. 964-965

Author(s):

Witold Słówko

Keyword(s):

Electron Energy ◽

Resolving Power ◽

Objective Lens ◽

Energy Analyzer ◽

Planar Grid ◽

Electron Lens ◽

Spherical Analyzer ◽

Voltage Contrast ◽

Extraction Electrode

In order to obtain a quantitative voltage contrast in SEMs various secondary electron energy analyzers are applied, often of a very sofisticated design. However, retarding field analyzers with planar or spherical fields are most popular because of their small dimensions which enable to place them below the objective lens. Spherical analyzers ensure better energy resolving power but contain too many grids (3-4) shadowing a sample when it is scanned.It is possible to design an analyzer equipped only with one grid which would save the advantages of the spherical one. Relatively good resolving power of the spherical analyzer results from the fact that electrons approach the retarding grid in perpendicular direction. The same effect can also be obtained for a planar grid when an electron lens is created below it and a sample is placed at the lens focus. The presented analyzer has been equipped with a two tube electron lens (Fig.1). The first tube plays simultaneously a role of the extraction electrode.

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Compact back-scattered electrons' energy analyzer for standard SEM

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100170177 ◽

1994 ◽

Vol 52 ◽

pp. 488-489

Author(s):

S. Likharev ◽

A. Kramarenko ◽

V. Vybornov

Keyword(s):

Depth Resolution ◽

High Energy ◽

Primary Beam ◽

Layer By Layer ◽

Energy Analyzer ◽

High Energy Part ◽

Small Window ◽

Energy Part ◽

Wide Range ◽

High Voltage Supply

At present time the interest is growing considerably for theoretical and experimental analysis of back-scattered electrons (BSE) energy spectra. It was discovered that a special angle and energy nitration of BSE flow could be used for increasing a spatial resolution of BSE mode, sample topography investigations and for layer-by layer visualizing of a depth structure. In the last case it was shown theoretically that in order to obtain suitable depth resolution it is necessary to select a part of BSE flow with the directions of velocities close to inverse to the primary beam and energies within a small window in the high-energy part of the whole spectrum.A wide range of such devices has been developed earlier, but all of them have considerable demerit: they can hardly be used with a standard SEM due to the necessity of sufficient SEM modifications like installation of large accessories in or out SEM chamber, mounting of specialized detector systems, input wires for high voltage supply, screening a primary beam from additional electromagnetic field, etc. In this report we present a new scheme of a compact BSE energy analyzer that is free of imperfections mentioned above.

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Quantitative material analysis using secondary electron energy spectromicroscopy

Scientific Reports ◽

10.1038/s41598-020-78973-0 ◽

2020 ◽

Vol 10 (1) ◽

Author(s):

W. Han ◽

M. Zheng ◽

A. Banerjee ◽

Y. Z. Luo ◽

L. Shen ◽

...

Keyword(s):

Electron Energy ◽

Close Agreement ◽

Secondary Electron ◽

Low Voltage ◽

High Accuracy ◽

Material Analysis ◽

Auger Microscopy ◽

New Applications ◽

Voltage Scanning ◽

Scanning Electron

AbstractThis paper demonstrates how secondary electron energy spectroscopy (SEES) performed inside a scanning electron microscope (SEM) can be used to map sample atomic number and acquire bulk valence band density of states (DOS) information at low primary beam voltages. The technique uses an electron energy analyser attachment to detect small changes in the shape of the scattered secondary electron (SE) spectrum and extract out fine structure features from it. Close agreement between experimental and theoretical bulk valance band DOS distributions was obtained for six different test samples, where the normalised root mean square deviation ranged from 2.7 to 6.7%. High accuracy levels of this kind do not appear to have been reported before. The results presented in this paper point towards SEES becoming a quantitative material analysis companion tool for low voltage scanning electron microscopy (LVSEM) and providing new applications for Scanning Auger Microscopy (SAM) instruments.

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