A New Spectroscopic Imager for X-rays from 0.5 keV to 150 keV Combining a Fully Depleted pnCCD Coupled to a Columnar CsI(Tl) Scintillator with Fano Limited Energy Resolution and Deep Subpixel Spatial Resolution

AbstractIn this paper we examine a recently proposed concept for obtaining sub-pixel spatial resolution in compound semiconductors where hole transport properties are relatively poor. [1] This approach uses weighted sums and differences of local pixel signals to extract both accurate x-ray energy estimates and interpolate location at the sub-pixel level. A simple analysis, including noise estimates, suggests the possibility of obtaining locations at the 50–100 micron level using 1–2 mm wide stripe electrodes while obtaining 1–2% energy resolution for x-rays up to 100 keV. Following this examination, we will present the most recent experimental results from our program to develop electronics to implement this scheme.

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Practical X-ray Spectrometry with Second-Generation Microcalorimeter Detectors

Microscopy Today ◽

10.1017/s1551929512000429 ◽

2012 ◽

Vol 20 (4) ◽

pp. 38-42 ◽

Cited By ~ 2

Author(s):

Robin Cantor ◽

Hideo Naito

Keyword(s):

Electron Microscope ◽

Spatial Resolution ◽

Energy Resolution ◽

Semiconductor Industry ◽

High Energy ◽

High Energy Resolution ◽

X Rays ◽

X Ray ◽

Analytical Technique ◽

Transmission Electron

X-ray spectroscopy is a widely used and extremely sensitive analytical technique for qualitative as well as quantitative elemental analysis. Typically, high-energy-resolution X-ray spectrometers are integrated with a high-spatial-resolution scanning electron microscope (SEM) or transmission electron microscope (TEM) for X-ray microanalysis applications. The focused electron beam of the SEM or TEM excites characteristic X rays that are emitted by the sample. The integrated X-ray spectrometer can then be used to identify and quantify the elemental composition of the sample on a sub-micron length scale. This combination of energy resolution and spatial resolution makes X-ray microanalysis of great importance to the semiconductor industry.

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High spatial resolution x-ray microanalysis of interfaces

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100137793 ◽

1995 ◽

Vol 53 ◽

pp. 284-285

Author(s):

J. R. Michael

Keyword(s):

Spatial Resolution ◽

Electron Probe ◽

Solid Angle ◽

Collection Efficiency ◽

Spatial Scales ◽

Energy Dispersive Spectrometer ◽

X Rays ◽

X Ray ◽

Probe Size ◽

Brightness Field

X-ray microanalysis in the analytical electron microscope (AEM) refers to a technique by which chemical composition can be determined on spatial scales of less than 10 nm. There are many factors that influence the quality of x-ray microanalysis. The minimum probe size with sufficient current for microanalysis that can be generated determines the ultimate spatial resolution of each individual microanalysis. However, it is also necessary to collect efficiently the x-rays generated. Modern high brightness field emission gun equipped AEMs can now generate probes that are less than 1 nm in diameter with high probe currents. Improving the x-ray collection solid angle of the solid state energy dispersive spectrometer (EDS) results in more efficient collection of x-ray generated by the interaction of the electron probe with the specimen, thus reducing the minimum detectability limit. The combination of decreased interaction volume due to smaller electron probe size and the increased collection efficiency due to larger solid angle of x-ray collection should enhance our ability to study interfacial segregation.

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Cryogenic high-resolution X-ray spectrometers for SR-XRF and microanalysis

Journal of Synchrotron Radiation ◽

10.1107/s0909049597014465 ◽

1998 ◽

Vol 5 (3) ◽

pp. 515-517 ◽

Cited By ~ 9

Author(s):

M. Frank ◽

C. A. Mears ◽

S. E. Labov ◽

L. J. Hiller ◽

J. B. le Grand ◽

...

Keyword(s):

High Resolution ◽

Energy Resolution ◽

Superconducting Tunnel Junction ◽

Semiconductor Detectors ◽

X Rays ◽

X Ray ◽

Sr Xrf ◽

Demonstration Experiment ◽

Near Future ◽

Stj Detector

Experimental results are presented obtained with a cryogenically cooled high-resolution X-ray spectrometer based on a 141 × 141 µm Nb-Al-Al2O3-Al-Nb superconducting tunnel junction (STJ) detector in an SR-XRF demonstration experiment. STJ detectors can operate at count rates approaching those of semiconductor detectors while still providing a significantly better energy resolution for soft X-rays. By measuring fluorescence X-rays from samples containing transition metals and low-Z elements, an FWHM energy resolution of 6–15 eV for X-rays in the energy range 180–1100 eV has been obtained. The results show that, in the near future, STJ detectors may prove very useful in XRF and microanalysis applications.

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Spatial resolution of imaging plate with flash X-rays and its utilization for radiography

10.1063/1.4917841 ◽

2015 ◽

Author(s):

A. M. Shaikh ◽

Romesh C. ◽

T. S. Kolage ◽

Archana Sharma

Keyword(s):

Spatial Resolution ◽

Imaging Plate ◽

X Rays ◽

Resolution Of Imaging

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High-energy resolution in X-ray scattering with the spectrometer INELAX. I. The principles and the test instrument

Journal of Applied Crystallography ◽

10.1107/s0021889891007884 ◽

1991 ◽

Vol 24 (6) ◽

pp. 1042-1050 ◽

Cited By ~ 6

Author(s):

E. Burkel ◽

B. Dorner ◽

Th. Illini ◽

J. Peisl

Keyword(s):

Energy Resolution ◽

High Energy ◽

Bragg Angle ◽

High Energy Resolution ◽

X Rays ◽

Test Results ◽

X Ray Scattering ◽

Radiation Sources ◽

Very High Energy ◽

Very High

Very high-energy resolution measurements using X-rays can be achieved by extreme backreflection (Bragg angle close to 90°) from perfect crystals. This technique, combined with the high intensity of X-rays emitted by synchrotron-radiation sources, allowed the development of the instrument INELAX for inelastic scattering experiments. The principles and test results are discussed.

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Advanced Synchrotron Radiation and Neutron Scattering Techniques for Microstructural Characterization in Industrial Research

Key Engineering Materials ◽

10.4028/www.scientific.net/kem.750.53 ◽

2017 ◽

Vol 750 ◽

pp. 53-66

Author(s):

Fabrizio Fiori ◽

Emmanuelle Girardin ◽

Alessandra Giuliani ◽

Adrian Manescu ◽

Serena Mazzoni ◽

...

Keyword(s):

Residual Stresses ◽

Spatial Resolution ◽

Small Angle ◽

3D Imaging ◽

Volume Fraction ◽

Rapid Development ◽

Small Angle Scattering ◽

Bragg Diffraction ◽

X Rays ◽

Angle Scattering

The rapid development of new materials and their application in an extremely wide variety of research and technological fields has lead to the request of increasingly sophisticated characterization methods. In particular residual stress measurements by neutron diffraction, small angle scattering of X-rays and neutrons, as well as 3D imaging techniques with spatial resolution at the micron or even sub-micron scale, like micro-and nano-computerized tomography, have gained a great relevance in recent years.Residual stresses are autobalancing stresses existing in a free body not submitted to any external surface force. Several manufacturing processes, as well as thermal and mechanical treatments, leave residual stresses within the components. Bragg diffraction of X-rays and neutrons can be used to determine residual elastic strains (and then residual stresses by knowing the material elastic constants) in a non-destructive way. Small Angle Scattering of neutrons or X-rays, complementary to Transmission Electron Microscopy, allows the determination of structural features such as volume fraction, specific surface and size distribution of inhomogeneities embedded in a matrix, in a huge variety of materials of industrial interest. X-ray microtomography is similar to conventional Computed Tomography employed in Medicine, allowing 3D imaging of the investigated samples, but with a much higher spatial resolution, down to the sub-micron scale. Some examples of applications of the experimental techniques mentioned above are described and discussed.

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Comparison between Various Designs of Micropattern Detectors

Innovative Applications and Developments of Micro-Pattern Gaseous Detectors - Advances in Chemical and Materials Engineering ◽

10.4018/978-1-4666-6014-4.ch011 ◽

2014 ◽

pp. 216-227

Keyword(s):

Energy Resolution ◽

High Energy Physics ◽

High Energy ◽

X Rays ◽

Position Resolution ◽

Advantages And Disadvantages ◽

Commercial Applications ◽

Reliability And Robustness ◽

Gas Gain ◽

Energy Physics

In this chapter a comparison between various designs of micropattern detectors is given, describing their specific advantages and disadvantages, which finally determines the fields of their applications. It is shown that at low counting rates the maximum achievable gas gain is determined by the Raether limit, which is about 106-107 electrons, depending on the design. At high counting rates, the maximum achievable gain additionally drops due to the contribution of several other effects (e.g. avalanches overlapping in space and time). Typically, micropattern detectors have a position resolution of ~30 µm, energy resolution of ~ 20% FWHM for 6 keV X-rays, and a time resolutions of ~1 ns. Some advanced designs offer even better characteristics. The diversity of micropattern detectors makes them attractive for many applications. For example, in measurements requiring simultaneously excellent time and position resolutions, mutigap multistrip detectors can be used in high energy physics applications, and hole-type structures are advantageous for the detection of visible photons. In some commercial applications, where reliability and robustness are important, spark protected detectors with resistive electrodes could be useful.

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