Theoretical Modeling of SiO2Photochemical Vapor Deposition and Comparison to Experimental Results for Three Oxidant Chemistries:  SiH4+ O2, H2O/O2, and H2O2

ABSTRACTThis work explores the effects of arsenic on rapid thermal chemical vapor deposition (RTCVD) of TiSi2. The films were deposited using TiCI4 and SiH4 on 100 mm oxide patterned silicon wafers selectively at temperatures ranging from 750°C to 850°C. Arsenic dose levels ranging from 3×1014 cm−2 to 5*times;1015 cm−2 at 50 keV were considered. Experimental results reveal that arsenic results in a resistance to TiSi2 nucleation and enhanced silicon substrate consumption. These effects are enhanced at higher arsenic dose levels and reduced at higher deposition temperatures. We propose an arsenic-surfacepassivation model to explain the effects.

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Temperature Effect on Mechanical Properties of Aluminum Film

Applied Mechanics and Materials ◽

10.4028/www.scientific.net/amm.479-480.96 ◽

2013 ◽

Vol 479-480 ◽

pp. 96-99 ◽

Cited By ~ 1

Author(s):

Shiuh Chuan Her ◽

Yi Hsiang Wang

Keyword(s):

Mechanical Properties ◽

Electron Beam ◽

Substrate Temperature ◽

Temperature Effect ◽

Vapor Deposition ◽

Glass Substrate ◽

Aluminum Film ◽

Experimental Results ◽

Aluminum Films

Aluminum films were prepared on the glass substrate by electron-beam vapor deposition. Nanoindentation tests were employed to determine the hardness and Youngs modulus of the Al film. The effect of substrate temperature on the mechanical properties of the Al film was investigated. Experimental results show that the hardness of Al film is increasing with the increase of the substrate temperature. It can also be observed that the Youngs modulus of Al film doesnt significantly depend on the substrate temperature.

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The Profile Development of a Twin-Land Oil-Control Ring During Running-In

Journal of Tribology ◽

10.1115/1.2834595 ◽

1998 ◽

Vol 120 (3) ◽

pp. 616-621 ◽

Cited By ~ 4

Author(s):

M. Visscher ◽

D. Dowson ◽

C. M. Taylor

Keyword(s):

Surface Roughness ◽

Theoretical Model ◽

Twist Angle ◽

Theoretical Modeling ◽

Experimental Results ◽

Roughness Height ◽

Profile Development ◽

Motored Engine

This paper presents experimental results of motored engine tests on the wear and profile development of a twin-land oil-control ring. It is shown that the roughness height of the plateau honed liner decreases during running-in, indicating that the deeper grooves remain unaffected. The piston lands are much smoother, and do not show a significant overall change in surface roughness. The profile development results are compared with computer predictions in order to verify the theoretical modeling. It is indicated that the worn land profiles remain tapered, with an inclination resembling the twist angle of the ring. However, there remains a difference in the experimental and the numerically predicted land inclinations. This is probably due to the piston tilt, which was not included in the theoretical model.

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In-Situ Monitoring of Micro-Chemical Vapor Deposition (µ-CVD): Experimental Results and Spice Modeling

1998 Solid-State, Actuators, and Microsystems Workshop Technical Digest ◽

10.31438/trf.hh1998.86 ◽

1998 ◽

Author(s):

R.P. Manginell ◽

J.H. Smith ◽

A.J. Ricco ◽

R.C. Hughes ◽

R. Huber ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Experimental Results ◽

In Situ Monitoring

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Theoretical Modeling, Analysis, and Experimental Results of a Hydraulic Artificial Muscle Prototype

ASME/BATH 2019 Symposium on Fluid Power and Motion Control ◽

10.1115/fpmc2019-1654 ◽

2019 ◽

Author(s):

Jonathon E. Slightam ◽

Mark L. Nagurka

Keyword(s):

Muscle Mechanics ◽

Weight Ratio ◽

Artificial Muscle ◽

Theoretical Modeling ◽

Experimental Results ◽

Artificial Muscles ◽

Mobile Manipulation ◽

Modeling Analysis ◽

Potential Applications ◽

High Internal Pressure

Abstract Fluidic braided artificial muscles have been studied for close to seventy years. Their high power-to-weight ratio and force-to-weight ratio make them a desirable actuation technology for compact and lightweight mobile manipulation. Use of hydraulics with fluidic artificial muscles has helped realize high actuation forces with new potential applications. To achieve large actuation forces produced from high internal pressure, artificial muscles operate near the limitations of their mechanical strength. Design improvements and future applications in mechanical systems will benefit from detailed theoretical analysis of the fluidic artificial muscle mechanics. This paper presents the theoretical modeling of a hydraulic artificial muscle, analysis of its mechanics, and experimental results that validate the model. A prototype is analyzed that operates at 14 MPa and can generate up to 6.3 kN of force and a displacement of 21.5 mm. This model promises to be useful for mechanical system design and model-based control.

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