Investigation of the chemical vapor deposition of silicon carbide from tetramethylsilane by in situ temperature and gas composition measurements
1992 ◽
Vol 96
(17)
◽
pp. 7063-7072
◽
2000 ◽
Vol 219
(3)
◽
pp. 245-252
◽
Keyword(s):
Keyword(s):
1995 ◽
Vol 53
◽
pp. 256-257
Keyword(s):
Keyword(s):
Keyword(s):
1999 ◽
Vol 61-62
◽
pp. 172-175
◽
2007 ◽
Vol 46
(4A)
◽
pp. 1415-1426
◽
1993 ◽
Vol 140
(12)
◽
pp. 3588-3590
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