This article reviews the latest advances in the synthesis of wafer-scale thin films using chemical vapor deposition and solution-based methods and various device applications.
We demonstrate large-area conductive polymer films using oxidative chemical vapor deposition and apply them to low-cost and durable conductive textiles.
A scaled-up hybrid physical-chemical vapor deposition (HPCVD) method has been developed to fabricate large-area high-quality magnesium diboride (MgB2) thin films. The 2-in-diameter MgB2thin films on sapphire (0001) show uniform superconducting properties, includingTc~ 39 K, residual-resistivity ratio ~ 14, andJc(4.2 K) ~ 107A/cm2. X-ray diffraction showed that the films are epitaxial withc-axis normal to the film surface. The film properties are uniform across the 2-in substrate.