Low-temperature (≤150 °C) chemical vapor deposition of pure cobalt thin films
2014 ◽
Vol 32
(1)
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pp. 011206
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Keyword(s):
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1990 ◽
pp. 217-222
1992 ◽
Vol 139
(4)
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pp. 1151-1159
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1989 ◽
Vol 24
(2)
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pp. 213-219
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1998 ◽
Vol 21
(1-4)
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pp. 355-366
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2000 ◽
Vol 18
(4)
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pp. 1590-1594
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