Flash memory based on solution processed hafnium dioxide charge trapping layer

2014 ◽  
Vol 2 (21) ◽  
pp. 4233-4238 ◽  
Author(s):  
Jiaqing Zhuang ◽  
Su-Ting Han ◽  
Ye Zhou ◽  
V. A. L. Roy

Hafnium dioxide (HfO2) film prepared by the sol–gel technique has been used as a charge trapping layer in organic flash memory.

2006 ◽  
Vol 27 (8) ◽  
pp. 653-655 ◽  
Author(s):  
Hsin-Chiang You ◽  
Tze-Hsiang Hsu ◽  
Fu-Hsiang Ko ◽  
Jiang-Wen Huang ◽  
Wen-Luh Yang ◽  
...  

2016 ◽  
Vol 2016 ◽  
pp. 1-6 ◽  
Author(s):  
W. J. Liu ◽  
L. Chen ◽  
P. Zhou ◽  
Q. Q. Sun ◽  
H. L. Lu ◽  
...  

We demonstrated a flash memory device with chemical-vapor-deposited graphene as a charge trapping layer. It was found that the average RMS roughness of block oxide on graphene storage layer can be significantly reduced from 5.9 nm to 0.5 nm by inserting a seed metal layer, which was verified by AFM measurements. The memory window is 5.6 V for a dual sweep of ±12 V at room temperature. Moreover, a reduced hysteresis at the low temperature was observed, indicative of water molecules or −OH groups between graphene and dielectric playing an important role in memory windows.


2011 ◽  
Vol 44 (15) ◽  
pp. 155105 ◽  
Author(s):  
Yujeong Seo ◽  
Ho-Myoung An ◽  
Hee-Dong Kim ◽  
In Rok Hwang ◽  
Sa Hwan Hong ◽  
...  

Micromachines ◽  
2021 ◽  
Vol 12 (3) ◽  
pp. 328
Author(s):  
Young Suh Song ◽  
Byung-Gook Park

For improving retention characteristics in the NOR flash array, aluminum oxide (Al2O3, alumina) is utilized and incorporated as a tunneling layer. The proposed tunneling layers consist of SiO2/Al2O3/SiO2, which take advantage of higher permittivity and higher bandgap of Al2O3 compared to SiO2 and silicon nitride (Si3N4). By adopting the proposed tunneling layers in the NOR flash array, the threshold voltage window after 10 years from programming and erasing (P/E) was improved from 0.57 V to 4.57 V. In order to validate our proposed device structure, it is compared to another stacked-engineered structure with SiO2/Si3N4/SiO2 tunneling layers through technology computer-aided design (TCAD) simulation. In addition, to verify that our proposed structure is suitable for NOR flash array, disturbance issues are also carefully investigated. As a result, it has been demonstrated that the proposed structure can be successfully applied in NOR flash memory with significant retention improvement. Consequently, the possibility of utilizing HfO2 as a charge-trapping layer in NOR flash application is opened.


2006 ◽  
Vol 153 (11) ◽  
pp. G934 ◽  
Author(s):  
Tzu-Hsiang Hsu ◽  
Hsin-Chiang You ◽  
Fu-Hsiang Ko ◽  
Tan-Fu Lei
Keyword(s):  
Sol Gel ◽  

2013 ◽  
Vol 1 (2) ◽  
pp. 59-69 ◽  
Author(s):  
Sarbjit Kaur ◽  
Niraj Bala ◽  
Charu Khosla
Keyword(s):  
Sol Gel ◽  

2011 ◽  
Vol 4 (3) ◽  
pp. 224-237 ◽  
Author(s):  
Aurica P. Chiriac ◽  
Loredana E. Nita ◽  
Iordana Neamtu ◽  
Manuela T. Nistor
Keyword(s):  
Sol Gel ◽  

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