Heterogeneous sensors of pressure sensor and ultraviolet photodetector fabricated by vertical 3D stacking as a multi-functional device
Keyword(s):
Microelectromechanical system (MEMS) piezoresistive pressure sensor and ZnO nanowires (NWs) ultraviolet (UV) photodetector were 3D integrated into a single chip with a vertically stacked structure.
2021 ◽
Vol 1907
(1)
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pp. 012044
2017 ◽
Vol 88
(3)
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pp. 035002
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2013 ◽
Vol 313-314
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pp. 666-670
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1999 ◽
Keyword(s):