Low-temperature, nontoxic water-induced high-k zirconium oxide dielectrics for low-voltage, high-performance oxide thin-film transistors
2016 ◽
Vol 4
(45)
◽
pp. 10715-10721
◽
Keyword(s):
High K
◽
High-performance n- and p-type metal-oxide thin-film transistors are fabricated on ZrOx high-k dielectrics via a nontoxic water-inducement method.