Growth mechanism of AlN on hexagonal BN/sapphire substrate by metal–organic chemical vapor deposition

Plasma Treatment ◽

Growth Mechanism ◽

Sapphire Substrate ◽

Vapor Deposition ◽

Chemical Vapor ◽

Organic Chemical ◽

Metal Organic ◽

Dislocation Behavior ◽

The growth mechanism and dislocation behavior of AlN on monolayer hBN materials without/with O2plasma treatment by MOCVD.

Microstructural analysis of InGaN/GaN epitaxial layers of metal organic chemical vapor deposition on c-plane of convex patterned sapphire substrate

Thin Solid Films ◽

10.1016/j.tsf.2013.05.111 ◽

2013 ◽

Vol 546 ◽

pp. 104-107 ◽

Cited By ~ 4

Author(s):

Zhixin Wan ◽

Yinsheng He ◽

Cheljong Choi ◽

Eunkyung Suh ◽

Young Moon Yu ◽

...

Keyword(s):

Sapphire Substrate ◽

Vapor Deposition ◽

Microstructural Analysis ◽

Chemical Vapor ◽

Organic Chemical ◽

Epitaxial Layers ◽

Patterned Sapphire Substrate ◽

Metal Organic ◽

Al0.17Ga0.83N Film Using Middle-Temperature Intermediate Layer Grown on (0001) Sapphire Substrate by Metal-Organic Chemical Vapor Deposition

10.1143/jjap.46.491 ◽

2007 ◽

Vol 46 (2) ◽

pp. 491-495 ◽

Cited By ~ 2

Author(s):

Kazuhide Sumiyoshi ◽

Masashi Tsukihara ◽

Ken Kataoka ◽

Syuichi Kawamichi ◽

Takashi Okimoto ◽

...

Keyword(s):

Sapphire Substrate ◽

Vapor Deposition ◽

Intermediate Layer ◽

Chemical Vapor ◽

Organic Chemical ◽

Metal Organic ◽

Middle Temperature ◽

Low Al-composition p-GaN/Mg-doped Al0.25Ga0.75N/n+-GaN polarization-induced backward tunneling junction grown by metal-organic chemical vapor deposition on sapphire substrate

Scientific Reports ◽

10.1038/srep06322 ◽

2014 ◽

Vol 4 (1) ◽

Cited By ~ 9

Author(s):

Kexiong Zhang ◽

Hongwei Liang ◽

Yang Liu ◽

Rensheng Shen ◽

Wenping Guo ◽

...

Keyword(s):

Sapphire Substrate ◽

Vapor Deposition ◽

Chemical Vapor ◽

Organic Chemical ◽

Tunneling Junction ◽

Metal Organic ◽

Organic Chemical Vapor Deposition ◽

Mg Doped

Extenuation of Stress and Defects in GaN Films Grown on a Metal–Organic Chemical Vapor Deposition-GaN/c-Sapphire Substrate by Plasma-Assisted Molecular Beam Epitaxy

Crystal Growth & Design ◽

10.1021/acs.cgd.5b00125 ◽

2015 ◽

Vol 15 (5) ◽

pp. 2144-2150 ◽

Cited By ~ 30

Author(s):

Neha Aggarwal ◽

Shibin T. C. Krishna ◽

Lalit Goswami ◽

Monu Mishra ◽

Govind Gupta ◽

...

Keyword(s):

Molecular Beam Epitaxy ◽

Sapphire Substrate ◽

Vapor Deposition ◽

Molecular Beam ◽

Chemical Vapor ◽

Organic Chemical ◽

Metal Organic ◽

Effects of NH 3 Plasma Treatment of the Substrate on Metal Organic Chemical Vapor Deposition of Copper Films

10.1143/jjap.37.l991 ◽

1998 ◽

Vol 37 (Part 2, No. 8B) ◽

pp. L991-L994 ◽

Cited By ~ 6

Author(s):

Young Suk Kim ◽

Donggeun Jung ◽

Dong Joon Kim ◽

Suk-Ki Min

Keyword(s):

Plasma Treatment ◽

Vapor Deposition ◽

Chemical Vapor ◽

Organic Chemical ◽

Copper Films ◽

Metal Organic ◽

Effects of Sapphire Substrate Preparation on ZnO Epitaxial Growth by Atmospheric-Pressure Metal Organic Chemical Vapor Deposition

10.1143/jjap.46.342 ◽

2007 ◽

Vol 46 (1) ◽

pp. 342-344 ◽

Cited By ~ 6

Author(s):

Shutetsu Akiyama ◽

Kazunori Minegishi ◽

Tooru Tanaka ◽

Hiroshi Ogawa ◽

Masanobu Kasuga

Keyword(s):

Epitaxial Growth ◽

Sapphire Substrate ◽

Vapor Deposition ◽

Atmospheric Pressure ◽

Chemical Vapor ◽

Organic Chemical ◽

Substrate Preparation ◽

Metal Organic ◽

Improved crystal quality of GaN film with the in-plane lattice-matched In 0.17 Al 0.83 N interlayer grown on sapphire substrate using pulsed metal—organic chemical vapor deposition

Chinese Physics B ◽

10.1088/1674-1056/23/6/067103 ◽

2014 ◽

Vol 23 (6) ◽

pp. 067103

Author(s):

Liang Li ◽

Lin-An Yang ◽

Jun-Shuai Xue ◽

Rong-Tao Cao ◽

Sheng-Rui Xu ◽

...

Keyword(s):

Sapphire Substrate ◽

Vapor Deposition ◽

Chemical Vapor ◽

Organic Chemical ◽

Metal Organic ◽

Organic Chemical Vapor Deposition ◽

Lattice Matched ◽

Gan Film

Conformality of Chemical-Vapor-Deposited Tungsten on TiN Prepared by Metal-organic Chemical Vapor Deposition via Cyclic Plasma Treatment

10.1143/jjap.40.265 ◽

2001 ◽

Vol 40 (Part 1, No. 1) ◽

pp. 265-268 ◽

Cited By ~ 5

Author(s):

Soon-Hong Whang ◽

Jun Ki Kim ◽

Jin Won Park ◽

Do-Heyoung Kim ◽

Dong-Lyun Cho ◽

...

Keyword(s):

Plasma Treatment ◽

Vapor Deposition ◽

Chemical Vapor ◽

Organic Chemical ◽

Chemical Vapor Deposited ◽

Metal Organic ◽

Influence of thermally diffused aluminum atoms from sapphire substrate on the properties of ZnO epilayers grown by metal-organic chemical vapor deposition

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.3549136 ◽

2011 ◽

Vol 29 (3) ◽

pp. 03A106 ◽

Cited By ~ 22

Author(s):

Kun Tang ◽

Shulin Gu ◽

Shuzhen Li ◽

Jiandong Ye ◽

Shunming Zhu ◽

...

Keyword(s):

Sapphire Substrate ◽

Vapor Deposition ◽

Chemical Vapor ◽

Organic Chemical ◽

Metal Organic ◽

Growth Mechanism of YBa2Cu3O7-y Thin Film by Metal-Organic Chemical Vapor Deposition Using VLS Growth Mode

Advances in Superconductivity XII ◽

10.1007/978-4-431-66877-0_293 ◽

2000 ◽

pp. 981-983 ◽

Cited By ~ 1

Author(s):

Yutaka Yoshida ◽

Masato Hasegawa ◽

Kouichi Gotou ◽

Seok Beom Kim ◽

Izumi Hirabayashi ◽

...

Keyword(s):

Thin Film ◽

Growth Mechanism ◽

Vapor Deposition ◽

Chemical Vapor ◽

Growth Mode ◽

Organic Chemical ◽

Metal Organic ◽

Vls Growth ◽