scholarly journals Tantalum nitride coatings prepared by magnetron sputtering to improve the bioactivity and osteogenic activity for titanium alloy implants

RSC Advances ◽  
2017 ◽  
Vol 7 (87) ◽  
pp. 55408-55417 ◽  
Author(s):  
Ruiyan Li ◽  
Yanguo Qin ◽  
Guancong Liu ◽  
Congxiao Zhang ◽  
Haojun Liang ◽  
...  
Keyword(s):  
Titanium Alloy ◽  
Magnetron Sputtering ◽  
Tantalum Nitride ◽  
Osteogenic Activity ◽  
Nitride Coatings ◽  
Positive Effect

TaN film has a positive effect on the biocompatibility and osteoinductive ability of Ti6Al4V-based implants.

scholarly journals Effect of Bias Voltage on Microstructure and Properties of Tantalum Nitride Coatings Deposited by RF Magnetron Sputtering

Coatings ◽  
2021 ◽  
Vol 11 (8) ◽  
pp. 911
Author(s):  
Wei Dai ◽  
Yunzhan Shi
Keyword(s):  
Magnetron Sputtering ◽  
Bias Voltage ◽  
Rf Magnetron Sputtering ◽  
Amorphous Structure ◽  
Tribological Performance ◽  
Tantalum Nitride ◽  
Growth Morphology ◽  
Low Friction ◽  
Nitride Coatings ◽  
Overall Performance

TaNx coatings were deposited by RF magnetron sputtering with different bias voltages. The growth morphology, crystalline structure, chemical bond structure, hardness and elastic modulus, adhesion strength and tribological performance of the coatings were studied as a function of the bias voltage. The results showed that an increasing bias voltage refines the coating grains and facilitates structure densification. Simultaneously, the structure of the TaNx coatings transfers from a composite structure consisting of TaN and Ta2N crystals, through a single composite mainly composed of the Ta2N crystal, to an amorphous structure as the bias voltage increases from low to high, indicating that the phase composition of the TaNx coatings can be varied by the bias voltage. The coating composed of Ta2N crystal showed a good overall performance including enhanced hardness, enhanced adhesive strength, and good tribological performance with enhanced wear resistance and a low friction coefficient of 0.18.

Structural properties and corrosion resistance of tantalum nitride coatings produced by reactive DC magnetron sputtering

RSC Advances ◽  
2016 ◽  
Vol 6 (92) ◽  
pp. 89061-89072 ◽  
Author(s):  
M. Alishahi ◽  
F. Mahboubi ◽  
S. M. Mousavi Khoie ◽  
M. Aparicio ◽  
E. Lopez-Elvira ◽  
...  
Keyword(s):  
Corrosion Resistance ◽  
Magnetron Sputtering ◽  
Structural Properties ◽  
Tantalum Nitride ◽  
Dc Magnetron Sputtering ◽  
Sputtered Films ◽  
Nitride Coatings ◽  
Resistance Structure

There is a correlation between the corrosion resistance, structure, roughness and the porosity of TaN sputtered films.

Erosion-Resistant PVD ZrAlCuN Coating for Titanium Alloy

2010 ◽  
Vol 150-151 ◽  
pp. 51-55 ◽  
Author(s):  
Jun Du ◽  
Ping Zhang ◽  
Jun Jun Zhao ◽  
Zhi Hai Cai
Keyword(s):  
Mechanical Properties ◽  
Titanium Alloy ◽  
Titanium Alloys ◽  
Vapor Deposition ◽  
Physical Vapor Deposition ◽  
Erosion Resistance ◽  
Zirconium Nitride ◽  
Erosion Rates ◽  
Sand Erosion ◽  
Nitride Coatings

Titanium alloys are susceptible to sand erosion, hard zirconium nitride coatings have been deposited onto titanium alloys by Physical vapor deposition (PVD) in order to improve erosion resistance. Al and Cu were added into ZrN coatings to strength and toughing the coating. The microstructure and mechanical properties of ZrAlCuN coating were studied. Erosion tests were conducted to evaluate anti-erosion ability. Erosion rates were measured and characteristic damage features were identified on the surface of eroded specimens. The mechanisms of erosion are discussed in order to explain the promising performance of materials in erosive conditions. It was found that there is an significant increase of erosion resistance because of the increase of hardness and toughness.

scholarly journals Investigation of reactively sputtered TaN thin-film resistors for microwave photonic applications

2021 ◽  
pp. 93-98
Author(s):  
Evgenii Erofeev ◽  
Egor Polyntsev ◽  
Sergei Ishutkin
Keyword(s):  
Thin Film ◽  
Thermal Stability ◽  
Magnetron Sputtering ◽  
Electrical Resistance ◽  
High Thermal Stability ◽  
Tantalum Nitride ◽  
Reactive Magnetron ◽  
Microwave Photonic ◽  
Thin Film Resistors ◽  
Thermal Stability Of

Electrophysical characteristics and their thermal stability of thin-film resistors based on tantalum nitride (TaN) obtained by reactive magnetron sputtering were investigated. The optimal modes of the magnetron sputtering process are determined, ensuring the Ta2N phase film composition with the value of the specific electrical resistance of 250 μm cm and high thermal stability of the parameters. On the basis of the investigations carried out, thin-film matching resistors were manufactured for use as part of an electro-optical InP-based MZ modulator

Calcium Phosphate-Coated Titanium Alloy Implants Prepared by Radiofrequency Magnetron Sputtering: A Review

2012 ◽  
pp. 352-354
Author(s):  
Naru Shiraishi ◽  
Yuko Suzuki ◽  
Naoko Sato ◽  
Takahisa Anada ◽  
Takashi Goto ◽  
...  
Keyword(s):  
Titanium Alloy ◽  
Calcium Phosphate ◽  
Magnetron Sputtering

scholarly journals Large influence of vacancies on the elastic constants of cubic epitaxial tantalum nitride layers grown by reactive magnetron sputtering

2020 ◽  
Vol 184 ◽  
pp. 254-266 ◽  
Author(s):  
Grégory Abadias ◽  
Chen-Hui Li ◽  
Laurent Belliard ◽  
Qing Miao Hu ◽  
Nicolas Greneche ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Elastic Constants ◽  
Reactive Magnetron Sputtering ◽  
Tantalum Nitride ◽  
Reactive Magnetron ◽  
Large Influence ◽  
Nitride Layers
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