Three-dimensional line edge roughness in pre- and post-dry etch line and space patterns of block copolymer lithography

2020 ◽  
Vol 22 (2) ◽  
pp. 478-488
Author(s):  
Shubham Pinge ◽  
Yufeng Qiu ◽  
Victor Monreal ◽  
Durairaj Baskaran ◽  
Abhaiguru Ravirajan ◽  
...  
Keyword(s):  
Molecular Dynamics ◽  
Block Copolymer ◽  
Large Scale ◽  
Three Dimensional ◽  
Coarse Grained ◽  
Line Edge Roughness ◽  
Edge Roughness ◽  
Dry Etch ◽  
Block Copolymer Lithography ◽  
Symmetric Block

In this work, we employ large-scale coarse-grained molecular dynamics (CGMD) simulations to study the three-dimensional line edge roughness associated with line and space patterns of chemo-epitaxially directed symmetric block copolymers.

scholarly journals Dissipative particle dynamics model of homogalacturonan based on molecular dynamics simulations

2020 ◽  
Vol 10 (1) ◽  
Author(s):  
P. M. Pieczywek ◽  
W. Płaziński ◽  
A. Zdunek
Keyword(s):  
Molecular Dynamics ◽  
Force Field ◽  
Large Scale ◽  
Dissipative Particle Dynamics ◽  
Three Dimensional ◽  
Structural Features ◽  
Particle Dynamics ◽  
Distribution Functions ◽  
Coarse Grained ◽  
Dynamics Model

Abstract In this study we present an alternative dissipative particle dynamics (DPD) parametrization strategy based on data extracted from the united-atom molecular simulations. The model of the homogalacturonan was designed to test the ability of the formation of large-scale structures via hydrogen bonding in water. The extraction of coarse-grained parameters from atomistic molecular dynamics was achieved by means of the proposed molecule aggregation algorithm based on an iterative nearest neighbour search. A novel approach to a time-scale calibration scheme based on matching the average velocities of coarse-grained particles enabled the DPD forcefield to reproduce essential structural features of homogalacturonan molecular chains. The successful application of the proposed parametrization method allowed for the reproduction of the shapes of radial distribution functions, particle velocities and diffusivity of the atomistic molecular dynamics model using DPD force field. The structure of polygalacturonic acid molecules was mapped into the DPD force field by means of the distance and angular bond characteristics, which closely matched the MD results. The resulting DPD trajectories showed that randomly dispersed homogalacturonan chains had a tendency to aggregate into highly organized 3D structures. The final structure resembled a three-dimensional network created by tightly associated homogalacturonan chains organized into thick fibres.

scholarly journals Influence of Additives on the Interfacial Width and Line Edge Roughness in Block Copolymer Lithography

2020 ◽  
Vol 32 (6) ◽  
pp. 2399-2407 ◽  
Author(s):  
Daniel F. Sunday ◽  
Xuanxuan Chen ◽  
Thomas R. Albrecht ◽  
Derek Nowak ◽  
Paulina Rincon Delgadillo ◽  
...  
Keyword(s):  
Block Copolymer ◽  
Line Edge Roughness ◽  
Edge Roughness ◽  
Block Copolymer Lithography ◽  
Copolymer Lithography

scholarly journals Large scale three dimensional simulations of hybrid block copolymer/nanoparticle systems

Soft Matter ◽  
2019 ◽  
Vol 15 (45) ◽  
pp. 9325-9335
Author(s):  
Javier Diaz ◽  
Marco Pinna ◽  
Andrei V. Zvelindovsky ◽  
Ignacio Pagonabarraga
Keyword(s):  
Block Copolymer ◽  
Large Scale ◽  
Three Dimensional ◽  
High Concentration ◽  
Symmetric Block ◽  
Three Dimensional Simulations

Co-assembly of symmetric block copolymer and a high concentration of neutral nanoparticles leads to elongated block copolymer-rich domains.

Coarse-grained molecular dynamics modeling of the kinetics of lamellar block copolymer defect annealing

2016 ◽  
Vol 15 (1) ◽  
pp. 013508 ◽  
Author(s):  
Andrew J. Peters ◽  
Richard A. Lawson ◽  
Benjamin D. Nation ◽  
Peter J. Ludovice ◽  
Clifford L. Henderson
Keyword(s):  
Molecular Dynamics ◽  
Block Copolymer ◽  
Coarse Grained ◽  
Dynamics Modeling ◽  
Defect Annealing ◽  
Molecular Dynamics Modeling ◽  
Kinetics Of ◽  
Coarse Grained Molecular Dynamics

scholarly journals Antimicrobial action of the cationic peptide, chrysophsin-3: a coarse-grained molecular dynamics study

Soft Matter ◽  
2018 ◽  
Vol 14 (15) ◽  
pp. 2796-2807 ◽  
Author(s):  
Andrea Catte ◽  
Mark R. Wilson ◽  
Martin Walker ◽  
Vasily S. Oganesyan
Keyword(s):  
Molecular Dynamics ◽  
Large Scale ◽  
Md Simulations ◽  
Antimicrobial Action ◽  
Coarse Grained ◽  
Cationic Peptide ◽  
Coarse Grained Molecular Dynamics

Antimicrobial action of a cationic peptide is modelled by large scale MD simulations.

Designing an ordered template of cylindrical arrays based on a simple flat plate confinement of block copolymers: a coarse-grained molecular dynamics study

Soft Matter ◽  
2018 ◽  
Vol 14 (4) ◽  
pp. 597-613 ◽  
Author(s):  
Shubham Pinge ◽  
Guanyang Lin ◽  
Durairaj Baskaran ◽  
Munirathna Padmanaban ◽  
Yong Lak Joo
Keyword(s):  
Molecular Dynamics ◽  
Block Copolymers ◽  
Flat Plate ◽  
Large Scale ◽  
Coarse Grained ◽  
Coarse Grained Molecular Dynamics

In this paper we study the morphology formed by asymmetric di-block copolymers (di-BCPs) under various confinements using a large-scale coarse-grained molecular dynamics (CGMD) framework.

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