Scratch to sensitize: scratch-induced sensitivity enhancement in semiconductor thin-film sensors

Nanoscale ◽  
2019 ◽  
Vol 11 (32) ◽  
pp. 15374-15381 ◽  
Author(s):  
Geonhee Lee ◽  
Min Choi ◽  
Soo Sang Chae ◽  
Du Won Jeong ◽  
Won Jin Choi ◽  
...  
Keyword(s):  
Thin Film ◽  
Sensitivity Enhancement ◽  
Superior Performance ◽  
Chemical Sensitivity ◽  
Mechanical Abrasion ◽  
Thin Film Sensors ◽  
Aligned Arrays ◽  
Sensor Devices ◽  
Type Semiconductor ◽  
Semiconductor Thin Film

Nanoscale scratches were produced with mechanical abrasion to enhance the chemical sensitivity of thin-film-type semiconductor sensors; ZnO sensor devices with well-aligned arrays of scratches exhibited superior performance.

scholarly journals A review on thin films, conducting polymers as sensor devices

2022 ◽  
Author(s):  
E.L. Veera Prabakaran ◽  
K Senthil Vadivu ◽  
B Mouli Prasanth
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Environmental Conditions ◽  
Future Research ◽  
Physical Parameters ◽  
Research Needs ◽  
Future Perspectives ◽  
Thin Film Technology ◽  
Thin Film Sensors ◽  
Sensor Devices

Abstract Thin film sensors are used to monitor environmental conditions by measuring the physical parameters. By using thin film technology, the sensors are capable of conducting precise measurements. Moreover, the measurements are stable and dependable. Furthermore, inexpensive sensor devices can be produced. In this paper, thin film technology for the design and fabrication of sensors that are used in various applications is reviewed. Further, the applications of thin film sensors in the fields of biomedical, energy harvesting, optical, and corrosion applications are also presented. From the review, the future research needs and future perspectives are identified and discussed.

Helicity dependent temporal profile of the semiconductor thin film photoresponse

2021 ◽  
Vol 118 (20) ◽  
pp. 201105
Author(s):  
Gennady M. Mikheev ◽  
Arseniy E. Fateev ◽  
Vladimir Ya. Kogai ◽  
Tatyana N. Mogileva ◽  
Viatcheslav V. Vanyukov ◽  
...  
Keyword(s):  
Thin Film ◽  
Temporal Profile ◽  
Semiconductor Thin Film

scholarly journals Development of thin-film based sensors for temperature and tool wear monitoring during machining

2020 ◽  
Vol 87 (12) ◽  
pp. 768-776
Author(s):  
Marcel Plogmeyer ◽  
Germán González ◽  
Volker Schulze ◽  
Günter Bräuer
Keyword(s):  
Thin Film ◽  
Physical Vapor Deposition ◽  
Control Mechanisms ◽  
Insulation Layer ◽  
Sensor Layer ◽  
Thin Film Sensors ◽  
Wear Protection ◽  
Cutting Inserts ◽  
Wear Monitoring ◽  
Machining Operations

AbstractThe development of thin-film sensors for temperature and wear measurement in machining operations is presented in this work. A functional thin-film system, consisting of an Al2O3 insulation layer, a chromium sensor layer structured by photolithography and an Al2O3 wear-protection and insulation layer, is deposited by physical vapor deposition (PVD) processes onto the surface of cemented carbide cutting inserts. First specimen of the sensors are successfully fabricated and tested in laboratory experiments as well as in machining operations to demonstrate their functionality. These tool-integrated sensors can be used as an in-process monitoring device to determine the temperatures on the rake face at or close to the tool-chip contact area and to measure the progress of the flank-wear land width. The knowledge of these important process parameters opens up the possibility to develop new in-process control mechanisms in order to modify and improve the surface integrity of manufactured components. Thereby, their performance and lifetime can be enhanced.

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