High precision alignment of x‐ray transmission diffraction gratings

1988 ◽  
Vol 59 (3) ◽  
pp. 420-422 ◽  
Author(s):  
Andrew M. Hawryluk ◽  
Sherry L. Hill
Keyword(s):  
High Precision ◽  
Diffraction Gratings ◽  
X Ray

Fabrication of Si Mold Using ICP Etching for X-Ray Diffraction Grating

2012 ◽  
Vol 523-524 ◽  
pp. 587-591 ◽  
Author(s):  
Daiji Noda ◽  
Atsushi Tokuoka ◽  
Tadashi Hattori
Keyword(s):  
Thermal Oxidation ◽  
High Precision ◽  
Low Cost ◽  
Diffraction Gratings ◽  
Dry Etching ◽  
Phase Imaging ◽  
X Ray Diffraction ◽  
X Ray ◽  
Grating Pattern ◽  
Nano Imprint

We have fabricated X-ray diffraction gratings for X-ray phase imaging using X-ray Talbot interferometer. In this paper, we propose the new low cost fabrication process using Si mold of Si dry etching and nano-imprint techniques. Si dry etching makes it possible to fabricate high aspect ratio rectangular microstructures. Therefore, this technique is expected to fabricate high precision grating pattern. In this paper, we propose the new low cost fabrication processes using Si mold of ICP-RIE and nano-imprint techniques. And, in order to form transparence imprint mold, we used thermal oxidation of Si mold. These demonstrations of thermal oxidation are promising method for high precision transparence imprint mold with low cost, and realized low cost optical device such as diffraction gratings.

Automatic measurement of SAED patterns from asbestos minerals

1988 ◽  
Vol 46 ◽  
pp. 846-847
Author(s):  
J. C. Russ ◽  
T. Taguchi ◽  
P. M. Peters ◽  
E. Chatfield ◽  
J. C. Russ ◽  
...  
Keyword(s):  
Diffraction Pattern ◽  
High Precision ◽  
Diffraction Data ◽  
Automatic Measurement ◽  
Automatic Method ◽  
Important Method ◽  
X Ray ◽  
Integrated Intensity ◽  
Asbestiform Minerals ◽  
True Center

Conventional SAD patterns as obtained in the TEM present difficulties for identification of materials such as asbestiform minerals, although diffraction data is considered to be an important method for making this purpose. The preferred orientation of the fibers and the spotty patterns that are obtained do not readily lend themselves to measurement of the integrated intensity values for each d-spacing, and even the d-spacings may be hard to determine precisely because the true center location for the broken rings requires estimation. We have implemented an automatic method for diffraction pattern measurement to overcome these problems. It automatically locates the center of patterns with high precision, measures the radius of each ring of spots in the pattern, and integrates the density of spots in that ring. The resulting spectrum of intensity vs. radius is then used just as a conventional X-ray diffractometer scan would be, to locate peaks and produce a list of d,I values suitable for search/match comparison to known or expected phases.

High‐precision x‐ray reflectivity study of ultrathin SiO2 on Si

1996 ◽  
Vol 14 (3) ◽  
pp. 971-976 ◽  
Author(s):  
N. Awaji ◽  
Y. Sugita ◽  
T. Nakanishi ◽  
S. Ohkubo ◽  
K. Takasaki ◽  
...  
Keyword(s):  
High Precision ◽  
X Ray

scholarly journals Changing mass liner system for generation of soft X rays

1997 ◽  
Vol 15 (1) ◽  
pp. 133-138 ◽  
Author(s):  
A.M. Buyko ◽  
O.M. Burenkov ◽  
V.K. Chernyshev ◽  
S.F. Garanin ◽  
S.D. Kuznetsov ◽  
...  
Keyword(s):  
Current Pulse ◽  
High Precision ◽  
X Rays ◽  
Stored Energy ◽  
Single Experiment ◽  
X Ray ◽  
Liner System ◽  
The Cost

Powerful pulse installations are usually used to produce large yields of X-ray radiation. With an increase of the stored energy up to 100 MJ, the costof a single experiment on these installations becomes comparable to the cost of a shot with explosive magnetic generators (EMG), according to expert estimates. The physical scheme of a device with a changeable mass liner forlarge soft X-ray (in the range of 0.3 to 0.5 keV) yields eneration is investigated. The scheme investigated is substantially free from difficulties connected with high precision liners and fast switches for current pulse sharpening.

X-ray diffraction gratings for synchrotron radiation spectroscopy: a new fabrication method

1982 ◽  
Vol 21 (15) ◽  
pp. 2787 ◽  
Author(s):  
Shinji Matsui ◽  
Kazuyuki Moriwaki ◽  
Hiroaki Aritome ◽  
Susumu Namba ◽  
Shik Shin ◽  
...  
Keyword(s):  
Synchrotron Radiation ◽  
Diffraction Gratings ◽  
Fabrication Method ◽  
X Ray Diffraction ◽  
X Ray

Investigation on the Preparation of High Precision Multilayer X-ray Fresnel Zone Plates Based on Atomic Layer Deposition Technology

2021 ◽  
Vol 50 (1) ◽  
pp. 156-164
Author(s):  
吴鹿杰 Lujie WU ◽  
文庆涛 Qingtao WEN ◽  
高雅增 Yazeng GAO ◽  
卢维尔 Weier LU ◽  
夏洋 Yang XIA ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
High Precision ◽  
Fresnel Zone ◽  
Atomic Layer ◽  
Fresnel Zone Plates ◽  
X Ray ◽  
Zone Plates ◽  
Layer Deposition ◽  
Deposition Technology

High-Precision Characterization of Super-Multiperiod AlGaAs/GaAs Superlattices Using X-Ray Reflectometry on a Synchrotron Source

2021 ◽  
Author(s):  
L. I. Goray ◽  
E. V. Pirogov ◽  
M. V. Svechnikov ◽  
M. S. Sobolev ◽  
N. K. Polyakov ◽  
...  
Keyword(s):  
High Precision ◽  
Synchrotron Source ◽  
X Ray

Ion track etching of polycarbonate membranes monitored by in situ small angle X-ray scattering

2021 ◽  
Author(s):  
Alexander Kiy ◽  
Christian Notthoff ◽  
Shankar Dutt ◽  
Mark Grigg ◽  
Andrea Hadley ◽  
...  
Keyword(s):  
High Precision ◽  
Small Angle ◽  
Selective Dissolution ◽  
X Ray ◽  
Ion Tracks ◽  
X Ray Scattering ◽  
Track Etching ◽  
Polycarbonate Membranes ◽  
Ray Scattering

In situ small angle X-ray scattering (SAXS) measurements of ion track etching of polycarbonate foils are used to directly monitor the selective dissolution of ion tracks with high precision, including...

Fully Automated High-Precision X-Ray Diffraction

1968 ◽  
pp. 359-375 ◽  
Author(s):  
T. W. Baker ◽  
J. D. George ◽  
B. A. Bellamy ◽  
R. Causer
Keyword(s):  
High Precision ◽  
X Ray Diffraction ◽  
X Ray
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