In situ measurement of mechanical stress in polycrystalline zinc-oxide thin films prepared by magnetron sputtering

2000 ◽  
Vol 88 (5) ◽  
pp. 2443-2450 ◽  
Author(s):  
J. Hinze ◽  
K. Ellmer
Keyword(s):  
Thin Films ◽  
Zinc Oxide ◽  
Magnetron Sputtering ◽  
Mechanical Stress ◽  
In Situ Measurement ◽  
Oxide Thin Films ◽  
Polycrystalline Zinc

Conduction mechanism in sputtered polycrystalline zinc oxide thin films

1984 ◽  
Vol 117 (1) ◽  
pp. 19-32 ◽  
Author(s):  
T.L. Tansley ◽  
D.F. Neely ◽  
C.P. Foley
Keyword(s):  
Thin Films ◽  
Zinc Oxide ◽  
Conduction Mechanism ◽  
Oxide Thin Films ◽  
Polycrystalline Zinc

Microstructure and optoelectronic properties of galliumtitanium-zinc oxide thin films deposited by magnetron sputtering

2016 ◽  
Vol 12 (4) ◽  
pp. 280-284 ◽  
Author(s):  
Shou-bu Chen ◽  
Zhou Lu ◽  
Zhi-you Zhong ◽  
Hao Long ◽  
Jin-hua Gu ◽  
...  
Keyword(s):  
Thin Films ◽  
Zinc Oxide ◽  
Magnetron Sputtering ◽  
Optoelectronic Properties ◽  
Oxide Thin Films

Group III Impurity Doped Zinc Oxide Thin Films Prepared by RF Magnetron Sputtering

1985 ◽  
Vol 24 (Part 2, No. 10) ◽  
pp. L781-L784 ◽  
Author(s):  
Tadatsugu Minami ◽  
Hirotoshi Sato ◽  
Hidehito Nanto ◽  
Shinzo Takata
Keyword(s):  
Thin Films ◽  
Zinc Oxide ◽  
Magnetron Sputtering ◽  
Rf Magnetron Sputtering ◽  
Oxide Thin Films ◽  
Group Iii ◽  
Impurity Doped
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