Practical scheme for three-dimensional simulation of electron cyclotron resonance plasma reactors
1997 ◽
Vol 36
(Part 1, No. 7B)
◽
pp. 4773-4776
◽
2011 ◽
Vol 50
(4)
◽
pp. 04DA09
◽
2011 ◽
Vol 50
(4S)
◽
pp. 04DA09
◽
2002 ◽
Vol 11
(3)
◽
pp. 260-265
◽
1993 ◽
Vol 11
(6)
◽
pp. 2883-2892
◽