Young’s modulus, Poisson’s ratio, and residual stress and strain in (111)-oriented scandium nitride thin films on silicon
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2003 ◽
Vol 16
(2)
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pp. 46-54
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2009 ◽
Vol 44
(8)
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pp. 2167-2170
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2007 ◽
Vol 124-126
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pp. 1701-1704
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2008 ◽
Vol 01
(02)
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pp. 179-187
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