Design and Development of a D.C. Magnetron Sputtering System for Thin Film and Multilayer Deposition

2011 ◽  
Author(s):  
Debarati Bhattacharya ◽  
A. Biswas ◽  
K. G. Bhushan ◽  
M. Swain ◽  
S. Basu ◽  
...  
Keyword(s):  
Thin Film ◽  
Magnetron Sputtering ◽  
Design And Development ◽  
Multilayer Deposition ◽  
Sputtering System

Design and development of an in-line sputtering system and process development of thin film multilayer neutron supermirrors

2014 ◽  
Vol 85 (12) ◽  
pp. 123103 ◽  
Author(s):  
A. Biswas ◽  
R. Sampathkumar ◽  
Ajaya Kumar ◽  
D. Bhattacharyya ◽  
N. K. Sahoo ◽  
...  
Keyword(s):  
Thin Film ◽  
Process Development ◽  
Design And Development ◽  
Sputtering System

FORMATION OF TRIANGULAR Cu MICROCRYSTALS IN Ti/Cu/Si THIN FILMS DURING ANNEALING

2018 ◽  
Vol 25 (05) ◽  
pp. 1850097
Author(s):  
QIJING LIN ◽  
WEIXUAN JING ◽  
ZHUANGDE JIANG ◽  
NA ZHAO ◽  
ZIRONG WU ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Magnetron Sputtering ◽  
Rapid Thermal Annealing ◽  
Dc Magnetron Sputtering ◽  
Triangular Pyramid ◽  
Single Side ◽  
Surface Patterns ◽  
Cu Thin Film ◽  
Sputtering System

Sandwich stacked Ti/Cu/Si thin films were deposited on a single-side polished Si(111) substrate using DC magnetron sputtering system and annealed using a rapid thermal annealing (RTA) system. Complex dendritic patterns, whose branches are composed of Cu rods and triangular Cu microcrystals were obtained on Ti/Cu thin film annealed at 700[Formula: see text]C. The shape of one triangular Cu microcrystal is a truncated equilateral triangular pyramid with a flat top. Triangular Cu microcrystals grow in the number when Ti/Cu thin films are annealed at 800[Formula: see text]C. Experimental results show that anisotropy affects the growth of surface patterns and the top Ti capping layer works as a protection for the underlying Cu layer from oxidation.

Deposition of AZO thin film using RF and ICP at facing magnetron sputtering system

2014 ◽  
Vol 259 ◽  
pp. 39-43 ◽  
Author(s):  
Hye Ran Kim ◽  
Jay Bum Kim ◽  
Yoon Seok Choi ◽  
Masaru Hori ◽  
Jeon Geon Han
Keyword(s):  
Thin Film ◽  
Magnetron Sputtering ◽  
Azo Thin Film ◽  
Sputtering System

Design and Development of Magnetic Sensors Based on Giant Magnetoresistance (GMR) Materials

2006 ◽  
Vol 517 ◽  
pp. 207-211 ◽  
Author(s):  
Mitra Djamal ◽  
Darsikin ◽  
Togar Saragi ◽  
M. Barmawi
Keyword(s):  
Thin Film ◽  
Magnetron Sputtering ◽  
Hysteresis Loop ◽  
Giant Magnetoresistance ◽  
Magnetic Sensors ◽  
Vibrating Sample Magnetometer ◽  
Design And Development

This paper describes magnetic sensors that have been developed in the last three years. GMR thin film materials have been successfully developed using unpinned CoFe/Cu/CoFe sandwiches on Si(100) substrate using a home built dc-opposed-target magnetron sputtering (OTMS). The magnetization of the sandwich is measured using hysteresis loop instrument, the Vibrating Sample Magnetometer (VSM). It was found that the phase of GMR was formed, with the MR ratio 15.76%.

Design, plasma studies, and ion assisted thin film growth in an unbalanced dual target magnetron sputtering system with a solenoid coil

Vacuum ◽  
2000 ◽  
Vol 56 (2) ◽  
pp. 107-113 ◽  
Author(s):  
C Engström ◽  
T Berlind ◽  
J Birch ◽  
L Hultman ◽  
I.P Ivanov ◽  
...  
Keyword(s):  
Thin Film ◽  
Magnetron Sputtering ◽  
Film Growth ◽  
Thin Film Growth ◽  
Solenoid Coil ◽  
Dual Target ◽  
Sputtering System
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