Advanced in-situ electron-beam lithography for deterministic nanophotonic device processing
2015 ◽
Vol 86
(7)
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pp. 073903
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2015 ◽
Vol 33
(2)
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pp. 021603
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Keyword(s):
2016 ◽
Vol 55
(6S1)
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pp. 06GL07
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Keyword(s):
1995 ◽
Vol 13
(6)
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pp. 2777
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Keyword(s):
1996 ◽
Vol 40
(1-8)
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pp. 627-631
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2013 ◽
Vol 103
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pp. 137-143
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2006 ◽
Vol 203
(6)
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pp. 1094-1099
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2013 ◽
Vol 432
(2)
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pp. 345-349
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