Commercial development of a variable angle spectroscopic ellipsometer

1996 ◽  
Author(s):  
John A. Woollam
2000 ◽  
Vol 71 (7) ◽  
pp. 2677-2683 ◽  
Author(s):  
Guo-Qiang Xia ◽  
Rong-Jun Zhang ◽  
Yu-Li Chen ◽  
Hai-Bing Zhao ◽  
Song-You Wang ◽  
...  

Author(s):  
L. Mulestagno ◽  
J.C. Holzer ◽  
P. Fraundorf

Due to the wealth of information, both analytical and structural that can be obtained from it TEM always has been a favorite tool for the analysis of process-induced defects in semiconductor wafers. The only major disadvantage has always been, that the volume under study in the TEM is relatively small, making it difficult to locate low density defects, and sample preparation is a somewhat lengthy procedure. This problem has been somewhat alleviated by the availability of efficient low angle milling.Using a PIPS® variable angle ion -mill, manufactured by Gatan, we have been consistently obtaining planar specimens with a high quality thin area in excess of 5 × 104 μm2 in about half an hour (milling time), which has made it possible to locate defects at lower densities, or, for defects of relatively high density, obtain information which is statistically more significant (table 1).


Author(s):  
John R. Porter

New ceramic fibers, currently in various stages of commercial development, have been consolidated in intermetallic matrices such as γ-TiAl and FeAl. Fiber types include SiC, TiB2 and polycrystalline and single crystal Al2O3. This work required the development of techniques to characterize the thermochemical stability of these fibers in different matrices.SEM/EDS elemental mapping was used for this work. To obtain qualitative compositional/spatial information, the best realistically achievable counting statistics were required. We established that 128 × 128 maps, acquired with a 20 KeV accelerating voltage, 3 sec. live time per pixel (total mapping time, 18 h) and with beam current adjusted to give 30% dead time, provided adequate image quality at a magnification of 800X. The maps were acquired, with backgrounds subtracted, using a Noran TN 5500 EDS system. The images and maps were transferred to a Macintosh and converted into TIFF files using either TIFF Maker, or TNtolMAGE, a Microsoft QuickBASIC program developed at the Science Center. From TIFF files, images and maps were opened in either NIH Image or Adobe Photoshop for processing and analysis and printed from Microsoft Powerpoint on a Kodak XL7700 dye transfer image printer.


Author(s):  
W.W. Adams ◽  
S. J. Krause

Rigid-rod polymers such as PBO, poly(paraphenylene benzobisoxazole), Figure 1a, are now in commercial development for use as high-performance fibers and for reinforcement at the molecular level in molecular composites. Spinning of liquid crystalline polyphosphoric acid solutions of PBO, followed by washing, drying, and tension heat treatment produces fibers which have the following properties: density of 1.59 g/cm3; tensile strength of 820 kpsi; tensile modulus of 52 Mpsi; compressive strength of 50 kpsi; they are electrically insulating; they do not absorb moisture; and they are insensitive to radiation, including ultraviolet. Since the chain modulus of PBO is estimated to be 730 GPa, the high stiffness also affords the opportunity to reinforce a flexible coil polymer at the molecular level, in analogy to a chopped fiber reinforced composite. The objectives of the molecular composite concept are to eliminate the thermal expansion coefficient mismatch between the fiber and the matrix, as occurs in conventional composites, to eliminate the interface between the fiber and the matrix, and, hopefully, to obtain synergistic effects from the exceptional stiffness of the rigid-rod molecule. These expectations have been confirmed in the case of blending rigid-rod PBZT, poly(paraphenylene benzobisthiazole), Figure 1b, with stiff-chain ABPBI, poly 2,5(6) benzimidazole, Fig. 1c A film with 30% PBZT/70% ABPBI had tensile strength 190 kpsi and tensile modulus of 13 Mpsi when solution spun from a 3% methane sulfonic acid solution into a film. The modulus, as predicted by rule of mixtures, for a film with this composition and with planar isotropic orientation, should be 16 Mpsi. The experimental value is 80% of the theoretical value indicating that the concept of a molecular composite is valid.


2017 ◽  
Vol 11 (1) ◽  
pp. 126-143
Author(s):  
Ocean Howell

American urban historians have begun to understand that digital mapping provides a potentially powerful tool to describe political power. There are now important projects that map change in the American city along a number of dimensions, including zoning, suburbanization, commercial development, transportation infrastructure, and especially segregation. Most projects use their visual sources to illustrate the material consequences of the policies of powerful agencies and dominant planning ‘regimes.’ As useful as these projects are, they often inadvertently imbue their visualizations with an aura of inevitability, and thereby present political power as a kind of static substance–possess this and you can remake the city to serve your interests. A new project called ‘Imagined San Francisco’ is motivated by a desire to expand upon this approach, treating visual material not only to illustrate outcomes, but also to interrogate historical processes, and using maps, plans, drawings, and photographs not only to show what did happen, but also what might have happened. By enabling users to layer a series of historical urban plans–with a special emphasis on unrealized plans–‘Imagined San Francisco’ presents the city not only as a series of material changes, but also as a contingent process and a battleground for political power.


Author(s):  
M. Sudharson ◽  
Dr. David Rathnaraj J. ◽  
S. Yuvraj ◽  
K. Sathiyalingam ◽  
N. Vivek masthiraj
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