The influence of the bias type, doping condition and pattern geometry on AFM tip‐induced local oxidation

2010 ◽  
Vol 33 (1) ◽  
pp. 55-61 ◽  
Author(s):  
Jen Ching Huang ◽  
Chin‐Lin Tsai ◽  
Ampere A. Tseng
Author(s):  
Peter Pegler ◽  
N. David Theodore ◽  
Ming Pan

High-pressure oxidation of silicon (HIPOX) is one of various techniques used for electrical-isolation of semiconductor-devices on silicon substrates. Other techniques have included local-oxidation of silicon (LOCOS), poly-buffered LOCOS, deep-trench isolation and separation of silicon by implanted oxygen (SIMOX). Reliable use of HIPOX for device-isolation requires an understanding of the behavior of the materials and structures being used and their interactions under different processing conditions. The effect of HIPOX-related stresses in the structures is of interest because structuraldefects, if formed, could electrically degrade devices.This investigation was performed to study the origin and behavior of defects in recessed HIPOX (RHIPOX) structures. The structures were exposed to a boron implant. Samples consisted of (i) RHlPOX'ed strip exposed to a boron implant, (ii) recessed strip prior to HIPOX, but exposed to a boron implant, (iii) test-pad prior to HIPOX, (iv) HIPOX'ed region away from R-HIPOX edge. Cross-section TEM specimens were prepared in the <110> substrate-geometry.


1978 ◽  
Vol 13 (4) ◽  
pp. 472-478 ◽  
Author(s):  
T. Yamaguchi ◽  
K.L. Seaward ◽  
J.L. Sachitano ◽  
S. Sato ◽  
D. Ritchie

2007 ◽  
Vol 43 (7) ◽  
pp. 392 ◽  
Author(s):  
L.K. Rowe ◽  
M. Elsey ◽  
N.G. Tarr ◽  
A.P. Knights ◽  
E. Post

2006 ◽  
Vol 512 ◽  
pp. 111-116 ◽  
Author(s):  
Yuki Matsuoka ◽  
Kazuyoshi Chikugo ◽  
Takakazu Suzuki ◽  
Yasuo Matsunaga ◽  
Shigeji Taniguchi

Ru coating prior to aluminizing is one of the effective methods to reduce the harmful intermediate layer that forms under the coating (SRZ) on a 4th generation Ni-base SC superalloy. This study examined the short-term isothermal oxidation behavior of this Ru-modified coating at 1373 K in air. Surface observation by SEM showed that the scale becomes flat and uniform in comparison to simple aluminide coating. XRD and cross-sectional analysis results also showed that phase transformation from β-NiAl to γ’-Ni3Al seldom occurs in the Ru-modified coating layer leading to the prevention of local oxidation.


2021 ◽  
Author(s):  
Vladimir Kovalevski ◽  
Mikhail Zobkov

&lt;p&gt;Morphological structure and chemical composition of environmental microplastics (MPs) extracted from water and bottom sediments of Lake Onego were studied. Raman spectroscopy was used to identify MPs polymer types and scanning electron microscopy with energy dispersive microanalysis was used to study the morphology and trace elements composition of inclusions on their surface. The features of the destruction of MPs, as well as the presence of various chemical elements on their surface including heavy metals, were investigated. Four main mechanisms of MPs microdestruction have been identified: (1) Local destruction of monophasic MPs caused by local oxidation and cleavage of thin flakes and fragments with the formation of nanoscale plastics. (2) The destruction of multiphase microplastics predominantly determined by the selective destruction of one of the phases of the composite, for example, the ligament scission between the individual components of the plastic with their separation. (3) Microbiological destruction of MPs under the influence of diatoms by fixing spores of diatoms on defects of MPs with their subsequent growth, deflection, and separation of nanoscale polymer particles. (4) Mineralogical destruction of MPs associated with the sorption of chemical elements and crystallization of nanocrystals, which under appropriate conditions begin to grow and break-up the MPs accelerating the process of its destruction. The last mechanism have not yet been reported. These mechanisms initiate nanoplastics formation, which increases particles mobility in the aquatic environment and their threat to water organisms. At the same time, the fouling with diatoms (with a silica shell) and the sorption of heavy elements increase the bulk specific density of MPs and contribute to its accumulation in bottom sediments.&lt;/p&gt;&lt;p&gt;The study was supported by the Russian Science Foundation grant number 19-17-00035.&lt;/p&gt;


1994 ◽  
Vol 364 ◽  
Author(s):  
J. Kameda ◽  
C. R. Gold ◽  
E. S. Lee ◽  
T. E. Bloomer ◽  
M. Yamaguchi

AbstractSmall punch (SP) tests on single grained titanium aluminide (Ti-48 at.%Al) specimens with 12° and 80° lamellar orientations with respect to the tensile stress axis were conducted at 1123 K in air. Brittle cracks readily extended through the thickness in the 80° lamellar structure. In a SP specimen with the 12° lamellar structure load-interrupted at the strain of 0.43%, surface cracks with the depth of 15–25 μm were formed along lamellar boundaries. Local oxidation behavior on partly sputtered surfaces in the load-interrupted 12° lamellar specimen was examined using scanning Auger microprobe (SAM). Oxygen enriched regions were observed near cracks and some lamellar layers. The mechanisms of high temperature oxygen-induced cracking are discussed in terms of the local oxidation near cracks and lamellar boundaries.


1998 ◽  
Vol 84 (5) ◽  
pp. 2732-2734 ◽  
Author(s):  
Shinji Fujieda ◽  
Hajime Nobusawa ◽  
Masayuki Hamada ◽  
Takaho Tanigawa

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