Strain relaxation in periodic arrays of Si/SiGe quantum wires determined by coplanar high-resolution x-ray diffraction and grazing incidence diffraction

AbstractHigh-resolution x-ray diffraction is an excellent probe of strain relaxation in complex SiGe structures. The high flux provided by synchrotron sources enables us to make extensive reciprocal space map measurements and evaluate many samples. The diffraction peak positions of each layer in a step-graded structure, measured for two different reflections, yield quantitative values for the relaxation and alloy composition in the layer. Grazing-incidence diffraction allows us to determine the in-plane structure of very thin layers, which have thickness-broadened peaks at conventional diffraction geometries. We demonstrate the power of these techniques with two examples.

Download Full-text

Investigation of Inhomogeneous In-Plane Strain Relaxation in Si/SiGe Quantum Wires by High Resolution x-ray Diffraction

MRS Proceedings ◽

10.1557/proc-590-207 ◽

1999 ◽

Vol 590 ◽

Author(s):

Y. Zhuang ◽

C. Schelling ◽

T. Roch ◽

A. Daniel ◽

F. Schäffler ◽

...

Keyword(s):

High Resolution ◽

Plane Strain ◽

Quantum Wires ◽

Strain Relaxation ◽

Grazing Incidence ◽

Shadow Mask ◽

X Ray ◽

Grazing Incidence Diffraction ◽

Before And After ◽

Dependent Strain

ABSTRACTThe structural properties of Si/SiGe quantum wires, which were grown by local solid source molecular beam epitaxy through a Si3N4/SiO2 wire-like shadow mask, were investigated by means of high resolution x-ray coplanar and x-ray grazing incidence diffraction, as well as by transmission electron microscopy. High resolution x-ray coplanar diffraction was used to obtain the average in-plane strain in Si/SiGe wires before and after removing the Si3N4/SiO2 shadow mask. x-ray grazing incidence diffraction measurements were performed to obtain information on the shape of the wires and on the depth-dependent strain relaxation. A finite element method was used to calculate the strain distribution in the Si/SiGe wires and in the Si substrate which clearly show the influence of the Si3N4/SiO2 shadow masks on the strain status of the Si/SiGe wires in agreement with the experimental data.

Download Full-text

Grazing incidence diffraction of cadmium arachidate multilayers at the solid-liquid interface

Zeitschrift für Kristallographie - Crystalline Materials ◽

10.1524/zkri.2005.220.12.987 ◽

2005 ◽

Vol 220 (12) ◽

Cited By ~ 2

Author(s):

Chad E. Miller ◽

Jaroslaw Majewski ◽

Thomas Gog ◽

Tonya L. Kuhl

Keyword(s):

Arachidic Acid ◽

Grazing Incidence ◽

X Ray Diffraction ◽

X Ray ◽

Organic Layers ◽

Grazing Incidence Diffraction ◽

Synchrotron Beam ◽

Solid Liquid Interface ◽

Solid Liquid ◽

Monochromatic Synchrotron

AbstractUsing complementary X-ray reflectivity (XR) and grazing incidence X-ray diffraction (GIXD), we report structural studies of supported thin-organic layers in contact with water and air. Using a monochromatic synchrotron beam to penetrate 10 mm of liquid, we have characterized buried films composed of 12.5 repeating bilayers of arachidic acid (C

Download Full-text

Waveguide-enhanced scattering from thin biomolecular films

Journal of Applied Crystallography ◽

10.1107/s0021889801021628 ◽

2002 ◽

Vol 35 (2) ◽

pp. 163-167 ◽

Cited By ~ 13

Author(s):

F. Pfeiffer ◽

U. Mennicke ◽

T. Salditt

Keyword(s):

Lipid Bilayers ◽

Signal To Noise Ratio ◽

Acyl Chain ◽

Grazing Incidence ◽

Waveguide Structure ◽

X Ray Diffraction ◽

Signal To Noise ◽

X Ray ◽

Grazing Incidence Diffraction ◽

Chain Ordering

An X-ray diffraction experiment on multilamellar membranes incorporated into an X-ray waveguide structure is reported. In the device, the lipid bilayers are confined to one side by the silicon substrate and to the other side by an evaporated thin metal cap layer. Shining a highly brilliant X-ray beam onto the system, resonantly enhanced, precisely defined and clearly distinguishable standing-wavefield distributions (modes) are excited. The in-plane structure of the acyl chain ordering is then studied by grazing incidence diffraction under simultaneously excited modes. A significant gain in signal-to-noise ratio as well as enhanced spatial resolution can be obtained with such a setup.

Download Full-text