Effects of capacitance termination of the internal antenna in inductively coupled plasma

Plasma Sources Science and Technology ◽

10.1088/0963-0252/9/2/313 ◽

2000 ◽

Vol 9 (2) ◽

pp. 199-204 ◽

Author(s):

K Suzuki ◽

K Konishi ◽

K Nakamura ◽

H Sugai

Keyword(s):

Inductively Coupled Plasma ◽

Inductively Coupled ◽

Internal Antenna

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Ferrite-Enhanced U-Shaped Internal Antenna for Large-Area Inductively Coupled Plasma System

IEEE Transactions on Plasma Science ◽

10.1109/tps.2009.2037966 ◽

2010 ◽

Vol 38 (2) ◽

pp. 133-136 ◽

Author(s):

Kyong Nam Kim ◽

Jong Hyeuk Lim ◽

Woong Sun Lim ◽

Geun Young Yeom

Keyword(s):

Inductively Coupled Plasma ◽

Plasma System ◽

Inductively Coupled ◽

Internal Antenna

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Characteristics of inductively coupled plasma with multiple U-type internal antenna for flat panel display applications

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2005.01.063 ◽

2005 ◽

Vol 200 (1-4) ◽

pp. 784-787 ◽

Author(s):

Kyong Nam Kim ◽

Seung Jae Jung ◽

Geun Young Yeom

Keyword(s):

Inductively Coupled Plasma ◽

Flat Panel Display ◽

Inductively Coupled ◽

Internal Antenna

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Computational Fluid Dynamic Modeling for Internal Antenna Type Inductively Coupled Plasma Systems

Applied Science and Convergence Technology ◽

10.5757/jkvs.2009.18.3.164 ◽

2009 ◽

Vol 18 (3) ◽

pp. 164-175 ◽

Author(s):

Jung-Hoon Joo

Keyword(s):

Dynamic Modeling ◽

Computational Fluid Dynamic ◽

Inductively Coupled Plasma ◽

Fluid Dynamic ◽

Inductively Coupled ◽

Antenna Type ◽

Internal Antenna ◽

Computational Fluid Dynamic Modeling

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Cl2-based Inductively Coupled Plasma Etching of InP Using Internal Antenna

Japanese Journal of Applied Physics ◽

10.1143/jjap.42.6837 ◽

2003 ◽

Vol 42 (Part 1, No. 11) ◽

pp. 6837-6838

Author(s):

Akihiro Matsutani ◽

Hideo Ohtsuki ◽

Fumio Koyama

Keyword(s):

Plasma Etching ◽

Inductively Coupled Plasma ◽

Inductively Coupled Plasma Etching ◽

Inductively Coupled ◽

Internal Antenna

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Determination of Ultra-Trace Scandium, Yttrium and Rare-Earth Elements in High-Purity Iron by High-Resolution Inductively Coupled Plasma-Mass Spectrometry

Matériaux & Techniques ◽

10.1051/mattech/200391120031s ◽

2003 ◽

Vol 91 ◽

pp. 31-36 ◽

Author(s):

Tetsuya Ashino ◽

Kunio Takada ◽

Kazuaki Wagatsuma ◽

Kenji Abiko

Keyword(s):

Mass Spectrometry ◽

High Resolution ◽

Inductively Coupled Plasma ◽

Inductively Coupled ◽

Plasma Mass Spectrometry ◽

Purity Iron ◽

High Purity Iron ◽

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Potential novel diagnostic applications of laser ablation inductively coupled plasma mass spectrometry in trace metal imaging of hepatic metal disorders

Zeitschrift für Gastroenterologie ◽

10.1055/s-0033-1360941 ◽

2014 ◽

Vol 52 (01) ◽

Author(s):

R Weiskirchen ◽

R Uerlings ◽

A Zimmermann ◽

JS Becker

Keyword(s):

Mass Spectrometry ◽

Laser Ablation ◽

Trace Metal ◽

Inductively Coupled Plasma ◽

Inductively Coupled ◽

Plasma Mass Spectrometry ◽

Diagnostic Applications

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Quantification of hepatic liver iron overload with laser ablation inductively coupled plasma mass spectrometry (LA-ICP-MS)

10.1055/s-0038-1677110 ◽

2019 ◽

Author(s):

R Weiskirchen ◽

P Kim ◽

S Weiskirchen ◽

R Uerlings ◽

A Kueppers ◽

...

Keyword(s):

Mass Spectrometry ◽

Laser Ablation ◽

Iron Overload ◽

Inductively Coupled Plasma ◽

Inductively Coupled ◽

Icp Ms ◽

Liver Iron Overload ◽

Plasma Mass Spectrometry

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Determination of Heavy Metals in DietarySupplements by Inductively Coupled Plasma-Mass Spectrometry

Planta Medica ◽

10.1055/s-2008-1075330 ◽

2008 ◽

Vol 74 (03) ◽

Author(s):

B Avula ◽

Y-H Wang ◽

IA Khan

Keyword(s):

Mass Spectrometry ◽

Heavy Metals ◽

Inductively Coupled Plasma ◽

Inductively Coupled ◽

Plasma Mass Spectrometry

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Determination of rare earth metals in magnesium alloys by atomic emission spectrometry with inductively coupled plasma

Izmeritel`naya Tekhnika ◽

10.32446/0368-1025it.2019-4-62-66 ◽

2019 ◽

pp. 62-66

Author(s):

R. M. Dvoretskov ◽

V. B. Baranovskaya ◽

F. N. Karachevtsev ◽

A. F. Letov

Keyword(s):

Magnesium Alloys ◽

Inductively Coupled Plasma ◽

Rare Earth Metals ◽

Atomic Emission ◽

Atomic Emission Spectrometry ◽

Emission Spectrometry ◽

Inductively Coupled

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TRANSITION BETWEEN E-MODE AND H-MODE IN A CYLINDRICAL INDUCTIVELY COUPLED PLASMA REACTOR

High Temperature Material Processes An International Quarterly of High-Technology Plasma Processes ◽

10.1615/hightempmatproc.v14.i1-2.100 ◽

2010 ◽

Vol 14 (1-2) ◽

pp. 119-127 ◽

Author(s):

F. Croccolo ◽

A. Quintini ◽

R. Barni ◽

C. Riccardi

Keyword(s):

Inductively Coupled Plasma ◽

Plasma Reactor ◽

Inductively Coupled ◽

Inductively Coupled Plasma Reactor

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