Monolithically integrated tri-axis shock accelerometers with MHz-level high resonant-frequency
2017 ◽
Vol 27
(7)
◽
pp. 075009
◽
2008 ◽
Vol E91-C
(10)
◽
pp. 1611-1615
◽
2014 ◽
Vol 532
◽
pp. 3-6
◽
Keyword(s):
2013 ◽
Vol 411-414
◽
pp. 1674-1679
◽
2021 ◽
Vol 2103
(1)
◽
pp. 012190
Keyword(s):