A multi-scale E-Jet 3D printing regulated by structured multi-physics field

Author(s):  
Kai Li ◽  
Yihui Zhao ◽  
Maiqi Liu ◽  
Xiaoying Wang ◽  
Fangyuan Zhang ◽  
...  

Abstract Micro/nano scale structure as important functional part have been widely used in wearable flexible sensors, gas sensors, biological tissue engineering, microfluidic chips super capacitors and so on. Here a multi-scale electrohydrodynamic jet (E-Jet) 3D printing approach regulated by structured multi-physics fields was demonstrated to generate 800 nm scale 2D geometries and high aspect ratio 3D structures. The simulation model of jetting process under resultant effect of top fluid field, middle electric field and bottom thermal field was established. And the physical mechanism and scale law of jet formation were studied. The effects of thermal field temperature, applied voltage and flow rate on the jet behaviors were studied; and the range of process parameters of stable jet was obtained. The regulation of printing parameters was used to manufacture the high resolution gradient graphics and the high aspect ratio structure with tight interlayer bonding. The structural features could be flexibly adjusted by reasonably matching the process parameters. Finally, PCL/PVP composite scaffolds with cell-scale fiber and ordered fiber spacing were printed. The proposed E-Jet printing method provides an alternative approach for the application of biopolymer materials in tissue engineering.

2009 ◽  
Vol 08 (03) ◽  
pp. 323-332 ◽  
Author(s):  
RA'A SAID ◽  
NIDAL ALSHWAWREH ◽  
YOUSEF HAIK

To add to the development efforts in enhancing the capabilities of localized electrodeposition (LED) fabrication technique, this paper presents serial and parallel deposition algorithms to fabricate array microstructures. Such arrays can be implemented as microsensors in neural recording applications or as antenna arrays in ultra high frequency applications. Also, magnetic tip microarrays for tissue engineering can be realized. In the case of serial fabrication, an array of high aspect ratio microstructures is realized using the conventional single-tip microelectrode while implementing a multistep fabrication algorithm. In this algorithm, the fabricated microstructure elements within the array are realized one at a time. In the parallel deposition algorithm, the array is realized using a multitip array microelectrode while implementing a single step fabrication algorithm. In this algorithm, the microstructure elements within the array are fabricated simultaneously. The proposed algorithms are compared through a demonstration of fabricated array microstructures.


COSMOS ◽  
2007 ◽  
Vol 03 (01) ◽  
pp. 79-88
Author(s):  
A. CHEN ◽  
G. LIU ◽  
L. K. JIAN ◽  
HERBERT O. MOSER

X-ray lithography with synchrotron radiation is an important nanolithographic tool which has unique advantages in the production of high aspect ratio nanostructures. The optimum synchrotron radiation spectrum for nanometer scale X-ray lithography is normally in the range of 500 eV to 2 keV. In this paper, we present the main methods, equipment, process parameters and preliminary results of nanofabrication by proximity X-ray lithography within the nanomanufacturing program pursued by Singapore Synchrotron Light Source (SSLS). Nanostructures with feature sizes down to 200 nm and an aspect ratio up to 10 have been successfully achieved by this approach.


RSC Advances ◽  
2016 ◽  
Vol 6 (36) ◽  
pp. 30722-30727 ◽  
Author(s):  
Yao Xie ◽  
Di Chen ◽  
Shujing Lin ◽  
Zhigang Wang ◽  
Daxiang Cui

A robust and easily integrated plasma separation chip is very important for integration with microfluidic chips.


2020 ◽  
Vol 12 (41) ◽  
pp. 46571-46577
Author(s):  
Heekwon Lee ◽  
Zhuofei Gan ◽  
Mojun Chen ◽  
Siyi Min ◽  
Jihyuk Yang ◽  
...  

2008 ◽  
Vol 44 (1) ◽  
pp. 9-15 ◽  
Author(s):  
E. Tam ◽  
K. Ostrikov ◽  
I. Levchenko ◽  
M. Keidar ◽  
S. Xu

2011 ◽  
Vol 88 (8) ◽  
pp. 1836-1839 ◽  
Author(s):  
C. Padeste ◽  
H. Özçelik ◽  
J. Ziegler ◽  
A. Schleunitz ◽  
M. Bednarzik ◽  
...  

Micromachines ◽  
2018 ◽  
Vol 9 (2) ◽  
pp. 58 ◽  
Author(s):  
Abdelkhalik Eladl ◽  
Rania Mostafa ◽  
Aminul Islam ◽  
Dario Loaldi ◽  
Hassan Soltan ◽  
...  

1995 ◽  
Vol 402 ◽  
Author(s):  
G. Grynkewich ◽  
V. Ilderem ◽  
M. Miller ◽  
S. Ramaswami

AbstractDecreasing contact dimensions coupled with the need for planarization to accommodate multiple layers of metal have created many challenges for the contact etch module. For example, contact etch processes are often required to stop on thin titanium silicide while at the same time forming high aspect ratio, straightwalled contacts. In this paper, the impact of various dielectric compositions and contact etch process parameters on etch profile, selectivity, and contact resistance is presented for the formation of high aspect ratio, submicron contacts to thin TiSi2 layers. The etch profile is formed by RIE using a mixture of CHF3 and various amounts of CF4. Surprisingly, the sidewall angle and selectivity to silicide showed little dependence on the percent CF4. Contact resistance measurements, however, varied greatly with percent CF4 and contact aspect ratio. The variation of contact resistance with etch chemistry was attributed to a variation in the extent of fluorocarbon polymer film formation, which in turn depends on the ratio of carbon to fluorine in the plasma. Finally, post contact etch treatments were examined for efficiency in removing the polymer films from the high aspect ratio contacts.


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