Development and characterization of an atmospheric pressure plasma reactor compatible with spatial ALD
2019 ◽
Vol 1243
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pp. 012002
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2012 ◽
Vol 21
(3)
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pp. 034017
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2014 ◽
Vol 42
(12)
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pp. 3698-3702
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2018 ◽
2015 ◽
Vol 43
(3)
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pp. 713-725
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Keyword(s):
2013 ◽
Vol 16
(1)
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2015 ◽
Vol 212
(7)
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pp. 1571-1577
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2013 ◽
Vol 10
(6)
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pp. 564-571
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